{"id":877,"date":"2026-06-25T01:55:35","date_gmt":"2026-06-25T01:55:35","guid":{"rendered":"https:\/\/oldhamcoupling.net\/oldham-couplings-in-semiconductor-equipment-wafer-handling-and-cleanroom-motion-systems\/"},"modified":"2026-06-25T01:55:35","modified_gmt":"2026-06-25T01:55:35","slug":"oldham-couplings-in-semiconductor-equipment-wafer-handling-and-cleanroom-motion-systems","status":"publish","type":"post","link":"https:\/\/oldhamcoupling.net\/zh\/oldham-couplings-in-semiconductor-equipment-wafer-handling-and-cleanroom-motion-systems\/","title":{"rendered":"\u534a\u5bfc\u4f53\u8bbe\u5907\u4e2d\u7684\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\uff1a\u6676\u5706\u5904\u7406\u548c\u6d01\u51c0\u5ba4\u8fd0\u52a8\u7cfb\u7edf"},"content":{"rendered":"

\u534a\u5bfc\u4f53\u5236\u9020\u53ef\u4ee5\u8bf4\u662f\u673a\u68b0\u90e8\u4ef6\u8fd0\u884c\u8981\u6c42\u6700\u4e3a\u4e25\u82db\u7684\u73af\u5883\u3002\u6240\u9700\u7684\u5b9a\u4f4d\u7cbe\u5ea6\u4ee5\u7eb3\u7c73\u4e3a\u5355\u4f4d\u3002\u6d01\u51c0\u5ea6\u6807\u51c6\u2014\u2014\u901a\u5e38\u4e3a ISO 1 \u7ea7\u81f3 ISO 4 \u7ea7\u6d01\u51c0\u5ba4\u2014\u2014\u5bf9\u7a7a\u6c14\u4e2d\u9897\u7c92\u7269\u7684\u542b\u91cf\u9650\u5236\u6781\u9ad8\uff0c\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u4ec5\u5141\u8bb8\u5b58\u5728\u6781\u5c11\u91cf\u7684\u9897\u7c92\u3002\u5316\u5b66\u73af\u5883\u5305\u542b\u8150\u8680\u6027\u5de5\u827a\u6c14\u4f53\u3001\u8d85\u7eaf\u6c34\u548c\u5f3a\u6548\u6eb6\u5242\u3002\u6c61\u67d3\u6216\u5b9a\u4f4d\u8bef\u5dee\u7684\u540e\u679c\u5e76\u975e\u8868\u9762\u7f3a\u9677\uff0c\u800c\u662f\u4ef7\u503c\u6570\u5343\u7f8e\u5143\u7684\u7845\u6676\u5706\u635f\u6bc1\uff0c\u751a\u81f3\u6574\u4e2a\u751f\u4ea7\u6279\u6b21\u7684\u82af\u7247\u62a5\u5e9f\u3002<\/p>\n

\u5728\u8fd9\u79cd\u73af\u5883\u4e0b\uff0c\u8fd0\u52a8\u7cfb\u7edf\u4e2d\u7684\u6bcf\u4e00\u4e2a\u673a\u68b0\u90e8\u4ef6\u90fd\u8981\u63a5\u53d7\u4e25\u683c\u7684\u5ba1\u67e5\uff0c\u5305\u62ec\u9897\u7c92\u7269\u4ea7\u751f\u3001\u6c14\u4f53\u91ca\u653e\u3001\u5316\u5b66\u76f8\u5bb9\u6027\u548c\u4f4d\u7f6e\u7cbe\u5ea6\u3002 \u5965\u5c14\u5fb7\u59c6\u8026\u5408<\/strong> \u5965\u5c14\u5fb7\u59c6\u8026\u5408\u5668\u4e4b\u6240\u4ee5\u80fd\u7ecf\u53d7\u4f4f\u5982\u6b64\u4e25\u683c\u7684\u5ba1\u67e5\uff0c\u662f\u56e0\u4e3a\u5b83\u72ec\u7279\u5730\u7ed3\u5408\u4e86\u96f6\u53cd\u51b2\u3001\u96f6\u8f74\u627f\u8f7d\u8377\u3001\u7535\u6c14\u9694\u79bb\u4ee5\u53ca\u53ef\u91c7\u7528\u8d85\u4f4e\u91ca\u6c14\u6750\u6599\u7b49\u7279\u6027\uff0c\u6ee1\u8db3\u4e86\u5176\u4ed6\u5e38\u89c1\u8026\u5408\u5668\u7c7b\u578b\u65e0\u6cd5\u540c\u65f6\u6ee1\u8db3\u7684\u8bf8\u591a\u8981\u6c42\u3002\u672c\u6587\u5c06\u63a2\u8ba8\u534a\u5bfc\u4f53\u8bbe\u5907\u4e2d\u5965\u5c14\u5fb7\u59c6\u8026\u5408\u5668\u7684\u5177\u4f53\u5e94\u7528\u3001\u6750\u6599\u8981\u6c42\u548c\u6027\u80fd\u6807\u51c6\u3002<\/p>\n

\n \"\u5965\u5c14\u5fb7\u59c6\u8026\u5408\u534a\u5bfc\u4f53\u8bbe\u5907\u6d01\u51c0\u5ba4\u6676\u5706\u5904\u7406\u7cbe\u5ea6\"
\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u73af\u5883\u4e2d\uff0c\u8026\u5408\u6750\u6599\u7684\u9009\u62e9\u53d6\u51b3\u4e8e\u9897\u7c92\u751f\u6210\u901f\u7387\u3001\u8131\u6c14\u6c34\u5e73\u4ee5\u53ca\u4e0e\u5de5\u827a\u6c14\u4f53\u548c\u8d85\u7eaf\u6c34\u7684\u5316\u5b66\u76f8\u5bb9\u6027\u2014\u2014\u8fd9\u4e9b\u8981\u6c42\u662f\u6807\u51c6\u5de5\u4e1a\u8026\u5408\u65e0\u6cd5\u6ee1\u8db3\u7684\u3002<\/figcaption><\/figure>\n

\u6d01\u51c0\u5ba4\u6c61\u67d3\u6311\u6218<\/h2>\n

\u5728\u5149\u523b\u8fc7\u7a0b\u4e2d\uff0c\u5373\u4f7f\u662f\u5927\u4e8e0.1\u5fae\u7c73\u7684\u5355\u4e2a\u9897\u7c92\u843d\u5728\u6676\u5706\u8868\u9762\uff0c\u4e5f\u53ef\u80fd\u5bfc\u81f4\u96c6\u6210\u7535\u8def\u5236\u9020\u8fc7\u7a0b\u4e2d\u51fa\u73b0\u4e25\u91cd\u7f3a\u9677\u3002\u805a\u5408\u7269\u7ec4\u5206\u91ca\u653e\u51fa\u7684\u6709\u673a\u5316\u5408\u7269\u5206\u5b50\u4e5f\u53ef\u80fd\u6c89\u79ef\u5728\u6676\u5706\u8868\u9762\uff0c\u6539\u53d8\u8868\u9762\u80fd\uff0c\u4ece\u800c\u5f71\u54cd\u5149\u523b\u80f6\u7684\u9644\u7740\u529b\u3001\u523b\u8680\u5747\u5300\u6027\u6216\u8584\u819c\u6c89\u79ef\u3002\u8fd9\u4e9b\u5e76\u975e\u7406\u8bba\u4e0a\u7684\u95ee\u9898\uff0c\u800c\u662f\u534a\u5bfc\u4f53\u5de5\u827a\u5de5\u7a0b\u5e08\u65e5\u5e38\u9762\u4e34\u7684\u6c61\u67d3\u7ba1\u7406\u6311\u6218\u3002<\/p>\n

\u6676\u5706\u5904\u7406\u8def\u5f84\u4e2d\u7684\u6bcf\u4e2a\u673a\u68b0\u90e8\u4ef6\u2014\u2014\u673a\u5668\u4eba\u3001\u7ebf\u6027\u5e73\u53f0\u3001\u65cb\u8f6c\u5e73\u53f0\u4ee5\u53ca\u8fde\u63a5\u5176\u9a71\u52a8\u88c5\u7f6e\u7684\u8054\u8f74\u5668\u2014\u2014\u90fd\u5fc5\u987b\u8fdb\u884c\u8bc4\u4f30\uff0c\u8bc4\u4f30\u5185\u5bb9\u5305\u62ec\uff1a<\/p>\n

    \n
  • \u7c92\u5b50\u751f\u6210\u7387\uff1a<\/strong> \u8be5\u90e8\u4ef6\u5728\u6b63\u5e38\u8fd0\u884c\u671f\u95f4\u5355\u4f4d\u65f6\u95f4\u5185\u4f1a\u8131\u843d\u591a\u5c11\u7279\u5b9a\u5c3a\u5bf8\u7684\u9897\u7c92\uff1f\u8be5\u6570\u503c\u5728\u53d7\u63a7\u8154\u5ba4\u4e2d\u6d4b\u91cf\uff0c\u5e76\u4ee5\u6bcf\u5206\u949f\u6bcf\u5355\u4f4d\u9762\u79ef\u6216\u4f53\u79ef\u7684\u9897\u7c92\u6570\u8868\u793a\u3002<\/li>\n
  • \u8131\u6c14\u7387\uff1a<\/strong> \u5728\u771f\u7a7a\u6216\u8fd1\u771f\u7a7a\u6761\u4ef6\u4e0b\uff0c\u7ec4\u4ef6\u5728\u5de5\u4f5c\u6e29\u5ea6\u4e0b\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269\uff08VOC\uff09\u7684\u6392\u653e\u901f\u7387\u662f\u591a\u5c11\uff1f\u8be5\u53c2\u6570\u4ee5Pa\u00b7m\u00b3\/s\/\u5355\u4f4d\u9762\u79ef\u4e3a\u5355\u4f4d\u6d4b\u91cf\uff0c\u51b3\u5b9a\u4e86\u6750\u6599\u662f\u5426\u9002\u7528\u4e8e\u771f\u7a7a\u5de5\u827a\u8154\u5ba4\u3002<\/li>\n
  • \u5316\u5b66\u76f8\u5bb9\u6027\uff1a<\/strong> \u8be5\u6750\u6599\u662f\u5426\u80fd\u62b5\u6297\u5176\u64cd\u4f5c\u533a\u57df\u5185\u5b58\u5728\u7684\u5de5\u827a\u5316\u5b66\u54c1\uff08\u5982\u6c1f\u5316\u6c22\u84b8\u6c7d\u3001\u81ed\u6c27\u3001\u5f02\u4e19\u9187\u3001\u6c22\u6c27\u5316\u94f5\u3001\u8fc7\u6c27\u5316\u6c22\u7b49\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u5de5\u827a\u6b65\u9aa4\uff09\uff1f<\/li>\n
  • \u79bb\u5b50\u6c61\u67d3\uff1a<\/strong> \u8be5\u6750\u6599\u662f\u5426\u4f1a\u91ca\u653e\u91d1\u5c5e\u79bb\u5b50\u6216\u5176\u4ed6\u79bb\u5b50\u7269\u8d28\uff0c\u8fd9\u4e9b\u7269\u8d28\u53ef\u80fd\u4f1a\u6c89\u79ef\u5728\u6676\u5706\u8868\u9762\u5e76\u6539\u53d8\u5668\u4ef6\u7684\u7535\u7279\u6027\uff1f<\/li>\n<\/ul>\n

    \u4e3a\u4ec0\u4e48\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u7684\u6ed1\u52a8\u76d8\u65e2\u662f\u6311\u6218\u4e5f\u662f\u89e3\u51b3\u65b9\u6848<\/h2>\n

    \u4e2d\u5fc3\u76d8\u7684\u6ed1\u52a8\u8fd0\u52a8\u662f\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u5b9e\u73b0\u4e0d\u5bf9\u4e2d\u8865\u507f\u80fd\u529b\u7684\u6765\u6e90\uff0c\u4f46\u540c\u65f6\u4e5f\u662f\u4ea7\u751f\u9897\u7c92\u7269\u7684\u6f5c\u5728\u6765\u6e90\u3002\u4efb\u4f55\u6ed1\u52a8\u63a5\u89e6\u90fd\u4f1a\u4ea7\u751f\u78e8\u635f\u788e\u5c51\uff0c\u5728\u6d01\u51c0\u5ba4\u73af\u5883\u4e2d\uff0c\u5fc5\u987b\u5bf9\u8fd9\u4e9b\u788e\u5c51\u9897\u7c92\u8fdb\u884c\u5904\u7406\u3002<\/p>\n

    \u5173\u952e\u5728\u4e8e\u6750\u6599\u9009\u62e9\u3002\u6807\u51c6\u805a\u919a\u919a\u916e\uff08PEEK\uff09\u5728\u8fd0\u884c\u8fc7\u7a0b\u4e2d\u4f1a\u4ea7\u751f\u53ef\u6d4b\u91cf\u7684\u9897\u7c92\uff0c\u8fd9\u4e9b\u9897\u7c92\u5728\u5de5\u4e1a\u73af\u5883\u4e2d\u53ef\u4ee5\u63a5\u53d7\uff0c\u4f46\u5176\u9897\u7c92\u6570\u91cf\u548c\u7c92\u5f84\u5206\u5e03\u8fc7\u9ad8\uff0c\u4e0d\u7b26\u5408ISO 3\u7ea7\u6216\u66f4\u9ad8\u7b49\u7ea7\u6d01\u51c0\u5ba4\u7684\u8981\u6c42\u3002PEEK\uff0c\u5c24\u5176\u662f\u586b\u5145\u805a\u56db\u6c1f\u4e59\u70ef\uff08PTFE\uff09\u6216\u78b3\u7ea4\u7ef4\u7684PEEK\uff0c\u5728\u76f8\u540c\u7684\u6ed1\u52a8\u6761\u4ef6\u4e0b\u4ea7\u751f\u7684\u9897\u7c92\u6570\u91cf\u663e\u8457\u51cf\u5c11\uff0c\u9897\u7c92\u5c3a\u5bf8\u4e5f\u66f4\u5c0f\uff0c\u5176\u7c92\u5f84\u5206\u5e03\u66f4\u7b26\u5408\u6d01\u51c0\u5ba4\u7b49\u7ea7\u6807\u51c6\u3002<\/p>\n

    \u5bf9\u4e8e\u8981\u6c42\u6700\u82db\u523b\u7684\u534a\u5bfc\u4f53\u5e94\u7528\u2014\u2014\u4f8b\u5982\u5728\u5de5\u827a\u8154\u5ba4\u6216 ISO 1 \u81f3 2 \u7ea7\u6d01\u51c0\u73af\u5883\u4e2d\u2014\u2014\u9700\u8981\u4f7f\u7528\u7eaf\u5ea6\u53ef\u63a7\u7684\u8d85\u6d01\u51c0 PEEK \u6750\u6599\uff08\u91d1\u5c5e\u79bb\u5b50\u542b\u91cf\u4f4e\uff0c\u4e0d\u542b\u53ef\u80fd\u9038\u51fa\u7684\u589e\u5851\u5242\u6216\u586b\u6599\uff09\u3002\u8fd9\u4e9b\u6750\u6599\u5728\u53d7\u63a7\u6761\u4ef6\u4e0b\u751f\u4ea7\uff0c\u6279\u6b21\u95f4\u7684\u9038\u51fa\u7387\u548c\u9897\u7c92\u751f\u6210\u7279\u6027\u5747\u6709\u636e\u53ef\u67e5\u3002\u867d\u7136\u5176\u6210\u672c\u8fdc\u9ad8\u4e8e\u6807\u51c6 PEEK\uff0c\u4f46\u5176\u9644\u5e26\u7684\u8ba4\u8bc1\u6570\u636e\u5305\u5bf9\u4e8e\u5bfb\u6c42\u82af\u7247\u5236\u9020\u5546\u5de5\u827a\u8bbe\u5907\u8ba4\u8bc1\u7684\u8bbe\u5907\u5236\u9020\u5546\u800c\u8a00\u81f3\u5173\u91cd\u8981\u3002<\/p>\n

    \u6676\u5706\u642c\u8fd0\u673a\u5668\u4eba\u5173\u8282<\/h2>\n

    \u5927\u6c14\u5f0f\u6676\u5706\u642c\u8fd0\u673a\u5668\u4eba\u2014\u2014\u5305\u62ec\u7528\u4e8e\u5728\u6676\u5706\u76d2\u3001\u88c5\u8f7d\u9501\u548c\u5de5\u827a\u8154\u4e4b\u95f4\u8f6c\u79fb\u6676\u5706\u7684SCARA\u673a\u5668\u4eba\u548c\u7b1b\u5361\u5c14\u673a\u5668\u4eba\u2014\u2014\u5177\u6709\u591a\u4e2a\u65cb\u8f6c\u5173\u8282\uff0c\u6bcf\u4e2a\u5173\u8282\u5747\u7531\u4f3a\u670d\u7535\u673a\u901a\u8fc7\u8c10\u6ce2\u9a71\u52a8\u5668\u6216\u51cf\u901f\u5668\u9a71\u52a8\u3002\u5728\u5927\u591a\u6570\u73b0\u4ee3\u8bbe\u8ba1\u4e2d\uff0c\u7535\u673a\u8f93\u51fa\u8f74\u4e0e\u8c10\u6ce2\u9a71\u52a8\u5668\u8f93\u5165\u8f74\u4e4b\u95f4\u7684\u8fde\u63a5\u91c7\u7528\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u3002<\/p>\n

    \u6b64\u5904\u7684\u8981\u6c42\u6781\u4e3a\u82db\u523b\u3002\u673a\u5668\u4eba\u5fc5\u987b\u5728\u5de5\u827a\u8154\u5165\u53e3\u69fd\u5904\u5c06300\u6beb\u7c73\u6676\u5706\u7684\u5b9a\u4f4d\u7cbe\u5ea6\u63a7\u5236\u5728\u00b10.1\u6beb\u7c73\u4ee5\u5185\uff0c\u4e14\u5728\u8bbe\u5907\u4f7f\u7528\u5bff\u547d\u671f\u95f4\u9700\u91cd\u590d\u6570\u767e\u4e07\u6b21\u3002\u4efb\u4f55\u5173\u8282\u5904\u7684\u8026\u5408\u95f4\u9699\u90fd\u4f1a\u5bfc\u81f4\u672b\u7aef\u6267\u884c\u5668\u5b9a\u4f4d\u8bef\u5dee\uff0c\u5e76\u88ab\u673a\u5668\u4eba\u7684\u8fd0\u52a8\u94fe\u653e\u5927\u3002\u56e0\u6b64\uff0c\u6bcf\u4e2a\u5173\u8282\u7684\u95f4\u9699\u90fd\u5fc5\u987b\u4e3a\u96f6\uff0c\u8fd9\u662f\u4e0d\u5bb9\u59a5\u534f\u7684\u5fc5\u8981\u6761\u4ef6\u3002<\/p>\n

    \u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u7684\u6a2a\u5411\u504f\u79fb\u516c\u5dee\u80fd\u591f\u5438\u6536\u7d27\u51d1\u578b\u5806\u53e0\u5f0f\u5173\u8282\u7ec4\u4ef6\u4e2d\u7535\u673a\u548c\u8c10\u6ce2\u9a71\u52a8\u5668\u4e4b\u95f4\u867d\u5c0f\u4f46\u4e0d\u53ef\u907f\u514d\u7684\u8f74\u4e0d\u5bf9\u4e2d\u2014\u2014\u8fd9\u79cd\u4e0d\u5bf9\u4e2d\u65e0\u6cd5\u901a\u8fc7\u57ab\u7247\u5728\u673a\u5668\u4eba\u5173\u8282\u58f3\u4f53\u7684\u72ed\u5c0f\u7a7a\u95f4\u5185\u8fdb\u884c\u6821\u6b63\u3002\u53e6\u4e00\u79cd\u65b9\u6848\u2014\u2014\u6ce2\u7eb9\u7ba1\u8054\u8f74\u5668\u2014\u2014\u4f1a\u5bf9\u8c10\u6ce2\u9a71\u52a8\u5668\u7684\u8f93\u5165\u8f74\u627f\u65bd\u52a0\u5f84\u5411\u8f7d\u8377\uff0c\u4ece\u800c\u7f29\u77ed\u5176\u4f7f\u7528\u5bff\u547d\u3002\u5bf9\u4e8e\u53ef\u80fd\u5b89\u88c5\u5728\u591a\u5e74\u670d\u52a1\u5408\u540c\u4e0b\u7684\u5de5\u827a\u8bbe\u5907\u4e2d\u7684\u673a\u5668\u4eba\u800c\u8a00\uff0c\u8be5\u90e8\u4ef6\u7684\u66f4\u6362\u6210\u672c\u9ad8\u6602\u4e14\u8017\u65f6\u3002<\/p>\n

    \n \"\u5965\u5c14\u5fb7\u59c6\u8026\u5408\u6676\u5706\u673a\u5668\u4eba\u5173\u8282\u8c10\u6ce2\u9a71\u52a8\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\"
    \u5728\u6676\u5706\u642c\u8fd0\u673a\u5668\u4eba\u5173\u8282\u4e2d\uff0c\u96f6\u80cc\u9699\u548c\u96f6\u5f84\u5411\u8f74\u627f\u8f7d\u8377\u540c\u6837\u81f3\u5173\u91cd\u8981\u2014\u2014\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u5728\u5806\u53e0\u5f0f\u673a\u5668\u4eba\u5173\u8282\u7ec4\u4ef6\u7684\u7d27\u51d1\u7a7a\u95f4\u5185\u5b9e\u73b0\u4e86\u8fd9\u4e24\u4e2a\u76ee\u6807\u3002<\/figcaption><\/figure>\n

    \u7ebf\u6027\u7cbe\u5bc6\u5e73\u53f0<\/h2>\n

    \u5149\u523b\u6b65\u8fdb\u673a\u548c\u626b\u63cf\u5668\u3001\u6676\u5706\u68c0\u6d4b\u7cfb\u7edf\u4ee5\u53ca\u8ba1\u91cf\u5de5\u5177\u5747\u91c7\u7528\u5b9a\u4f4d\u5206\u8fa8\u7387\u8fbe\u7eb3\u7c73\u7ea7\u7684\u8d85\u7cbe\u5bc6\u7ebf\u6027\u5e73\u53f0\u3002\u8be5\u5e73\u53f0\u7531\u7ebf\u6027\u7535\u673a\u6216\u6eda\u73e0\u4e1d\u6760\u9a71\u52a8\uff0c\u4f3a\u670d\u63a7\u5236\u56de\u8def\u901a\u8fc7\u6fc0\u5149\u5e72\u6d89\u4eea\u6216\u5149\u5b66\u7f16\u7801\u5668\u8bfb\u6570\u95ed\u5408\u3002\u9a71\u52a8\u94fe\u4e2d\u7684\u4efb\u4f55\u673a\u68b0\u67d4\u6027\u6216\u53cd\u51b2\u90fd\u4f1a\u76f4\u63a5\u8868\u73b0\u4e3a\u53cd\u9988\u56de\u8def\u4e2d\u7684\u4f4d\u7f6e\u8bef\u5dee\u3002<\/p>\n

    \u5728\u6eda\u73e0\u4e1d\u6760\u9a71\u52a8\u7684\u7cbe\u5bc6\u5de5\u4f5c\u53f0\u4e0a\uff0c\u4f3a\u670d\u7535\u673a\u548c\u6eda\u73e0\u4e1d\u6760\u4e4b\u95f4\u7684\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u4e0e\u4efb\u4f55\u6570\u63a7\u673a\u5e8a\u4e2d\u7684\u8054\u8f74\u5668\u529f\u80fd\u76f8\u540c\u2014\u2014\u5b9e\u73b0\u96f6\u80cc\u9699\u626d\u77e9\u4f20\u9012\u5e76\u9002\u5e94\u6a2a\u5411\u504f\u79fb\u2014\u2014\u4f46\u6027\u80fd\u6807\u51c6\u66f4\u9ad8\u3002\u8be5\u8054\u8f74\u5668\u5fc5\u987b\u5728\u5de5\u4f5c\u53f0\u7684\u6574\u4e2a\u5408\u683c\u4f7f\u7528\u5bff\u547d\u5185\u4fdd\u6301\u96f6\u80cc\u9699\uff0c\u901a\u5e38\u4e3a5\u81f310\u5e74\u7684\u65e5\u5e38\u4f7f\u7528\uff0c\u5176\u76d8\u7247\u66f4\u6362\u662f\u5de5\u4f5c\u53f0\u8ba1\u5212\u7ef4\u62a4\u7684\u4e00\u90e8\u5206\u3002\u7528\u4e8e\u8fd9\u4e9b\u5e94\u7528\u7684\u7cbe\u5bc6\u7ea7\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u7684\u69ab\u5934\u5bbd\u5ea6\u516c\u5dee\u6bd4\u6807\u51c6\u5de5\u4e1a\u8054\u8f74\u5668\u66f4\u5c0f\uff0c\u4ece\u800c\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u4e86\u88c5\u914d\u516c\u5dee\u7d2f\u79ef\u9020\u6210\u7684\u521d\u59cb\u80cc\u9699\u3002<\/p>\n

    \u771f\u7a7a\u517c\u5bb9\u6027\uff1a\u4e00\u9879\u81f3\u5173\u91cd\u8981\u7684\u9644\u52a0\u8981\u6c42<\/h2>\n

    \u8bb8\u591a\u534a\u5bfc\u4f53\u5de5\u827a\u6b65\u9aa4\u90fd\u5728\u771f\u7a7a\u4e2d\u8fdb\u884c\u2014\u2014\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u3001\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u79bb\u5b50\u6ce8\u5165\u548c\u523b\u8680\u5de5\u827a\u90fd\u5728\u4ece\u5927\u6c14\u538b\u5230 10\u207b\u2079 Torr \u7684\u538b\u529b\u8303\u56f4\u5185\u8fd0\u884c\u3002\u771f\u7a7a\u8154\u5185\u6216\u9644\u8fd1\u7684\u673a\u68b0\u90e8\u4ef6\u7684\u6392\u6c14\u901f\u7387\u4e0d\u5f97\u8d85\u8fc7\u7834\u574f\u5de5\u827a\u771f\u7a7a\u7684\u901f\u7387\u3002<\/p>\n

    \u6807\u51c6\u805a\u5408\u7269\u6750\u6599\u2014\u2014\u5305\u62ec\u6807\u51c6\u7ea7\u7f29\u919b\u3001\u5c3c\u9f99\uff0c\u751a\u81f3\u6807\u51c6\u7ea7\u805a\u919a\u919a\u916e\uff08PEEK\uff09\u2014\u2014\u542b\u6709\u6b8b\u7559\u5355\u4f53\u3001\u589e\u5851\u5242\u548c\u52a0\u5de5\u52a9\u5242\uff0c\u8fd9\u4e9b\u7269\u8d28\u5728\u771f\u7a7a\u4e2d\u4f1a\u4ee5\u9ad8\u771f\u7a7a\u534a\u5bfc\u4f53\u5de5\u827a\u65e0\u6cd5\u63a5\u53d7\u7684\u901f\u7387\u91ca\u653e\u6c14\u4f53\u3002\u771f\u7a7a\u517c\u5bb9\u578bPEEK\u7684\u751f\u4ea7\u8fc7\u7a0b\u4e2d\u4e25\u683c\u63a7\u5236\u4e86\u5176\u91ca\u653e\u6c14\u4f53\u7684\u901f\u7387\uff0c\u901a\u5e38\u7b26\u5408\u7f8e\u56fd\u56fd\u5bb6\u822a\u7a7a\u822a\u5929\u5c40\uff08NASA\uff09\u7684\u91ca\u653e\u6c14\u4f53\u6807\u51c6\uff08ASTM E595\uff09\uff1a\u5728125\u00b0C\u771f\u7a7a\u6761\u4ef6\u4e0b\u653e\u7f6e24\u5c0f\u65f6\u540e\uff0c\u603b\u8d28\u91cf\u635f\u5931\u4f4e\u4e8e1.0%\uff0c\u6536\u96c6\u5230\u7684\u6325\u53d1\u6027\u53ef\u51b7\u51dd\u7269\u8d28\u4f4e\u4e8e0.1%\u3002<\/p>\n

    \u5bf9\u4e8e\u7528\u4e8e\u771f\u7a7a\u73af\u5883\u7684\u5965\u5c14\u5fb7\u59c6\u63a5\u5934\uff0c\u5e94\u6307\u5b9a\u5236\u9020\u5546\u63d0\u4f9b\u7684\u3001\u5177\u6709\u76f8\u5173\u8131\u6c14\u6570\u636e\u7684\u76d8\u7247\u6750\u6599\u3002\u6807\u51c6\u76ee\u5f55\u4e2d\u7684\u63a5\u5934\u4e0d\u5177\u5907\u771f\u7a7a\u6027\u80fd\uff1b\u771f\u7a7a\u517c\u5bb9\u578b\u63a5\u5934\u9700\u8981\u7279\u5b9a\u7684\u6750\u6599\u8ba4\u8bc1\uff0c\u5e76\u4e14\u901a\u5e38\u9700\u8981\u5728\u5b89\u88c5\u5230\u5de5\u827a\u8154\u5ba4\u73af\u5883\u4e4b\u524d\u8fdb\u884c\u70d8\u70e4\u5904\u7406\u3002\u7528\u4e8e\u771f\u7a7a\u5e94\u7528\u7684\u8f6e\u6bc2\u6750\u6599\u901a\u5e38\u4e3a304\u6216316L\u4e0d\u9508\u94a2\uff0c\u5e76\u7ecf\u8fc7\u7535\u629b\u5149\u5904\u7406\u2014\u2014\u629b\u5149\u8868\u9762\u7684\u4f4e\u8868\u9762\u79ef\u4f53\u79ef\u6bd4\u53ef\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u5728\u771f\u7a7a\u4e2d\u8131\u9644\u7684\u5438\u9644\u6c14\u4f53\u5c42\u3002<\/p>\n

    \u534a\u5bfc\u4f53\u8bbe\u5907\u4e2d\u7684\u7535\u6c14\u8003\u8651\u56e0\u7d20<\/h2>\n

    \u534a\u5bfc\u4f53\u6676\u5706\u5bf9\u9759\u7535\u975e\u5e38\u654f\u611f\u2014\u2014\u5728\u642c\u8fd0\u8fc7\u7a0b\u4e2d\uff0c\u6676\u5706\u8868\u9762\u7684\u7535\u8377\u79ef\u7d2f\u4f1a\u5bfc\u81f4\u9759\u7535\u653e\u7535 (ESD) \u4e8b\u4ef6\uff0c\u8fd9\u79cd\u4e8b\u4ef6\u867d\u7136\u4e0d\u4f1a\u7559\u4e0b\u53ef\u89c1\u75d5\u8ff9\uff0c\u4f46\u5374\u4f1a\u7834\u574f\u5668\u4ef6\u529f\u80fd\u3002\u8bbe\u5907\u63a5\u5730\u548c\u9759\u7535\u7ba1\u7406\u672c\u8eab\u5c31\u662f\u534a\u5bfc\u4f53\u8bbe\u5907\u8bbe\u8ba1\u4e2d\u4e24\u4e2a\u72ec\u7acb\u7684\u5de5\u7a0b\u5b66\u79d1\u3002<\/p>\n

    \u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u7684\u7535\u9694\u79bb\u7279\u6027\uff08\u7531\u975e\u5bfc\u7535\u805a\u5408\u7269\u5706\u76d8\u63d0\u4f9b\uff09\u53ef\u9632\u6b62\u4f3a\u670d\u9a71\u52a8\u5668\u5207\u6362\u4ea7\u751f\u7684\u8f74\u7535\u6d41\u901a\u8fc7\u9a71\u52a8\u94fe\u4f20\u64ad\u5230\u673a\u5668\u4eba\u7ed3\u6784\uff0c\u5e76\u53ef\u80fd\u4f20\u64ad\u5230\u6676\u5706\u4e0a\u3002\u5728\u67d0\u4e9b\u5de5\u5177\u8bbe\u8ba1\u4e2d\uff0c\u8fd9\u79cd\u9694\u79bb\u662f\u7279\u610f\u8bbe\u8ba1\u5230\u9a71\u52a8\u7cfb\u7edf\u4e2d\u7684\uff0c\u4e13\u95e8\u4f7f\u7528\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u6765\u65ad\u5f00\u4f3a\u670d\u653e\u5927\u5668\u4e0e\u673a\u5668\u4eba\u5bfc\u7535\u672b\u7aef\u6267\u884c\u5668\u548c\u6676\u5706\u5904\u7406\u8868\u9762\u4e4b\u95f4\u7684\u7535\u6c14\u8fde\u7eed\u6027\u3002<\/p>\n

    \u76f8\u53cd\uff0c\u5728\u9700\u8981\u5c06\u673a\u5668\u4eba\u7ed3\u6784\u6574\u4f53\u63a5\u5730\u4ee5\u8fdb\u884c\u9759\u7535\u653e\u7535\u9632\u62a4\u7684\u5de5\u5177\u4e2d\uff0c\u901a\u5e38\u4f1a\u91c7\u7528\u91d1\u5c5e\u8026\u5408\u5668\u6765\u7ef4\u6301\u7535\u6c14\u8fde\u7eed\u6027\u3002\u8026\u5408\u5668\u7684\u89c4\u683c\u5fc5\u987b\u4e0e\u8bbe\u5907\u7684\u63a5\u5730\u67b6\u6784\u76f8\u5339\u914d\uff0c\u8fd9\u5c31\u9700\u8981\u5728\u9009\u62e9\u805a\u5408\u7269\u76d8\u7247\u5f0f\u5965\u5c14\u5fb7\u59c6\u8026\u5408\u5668\u8fd8\u662f\u91d1\u5c5e\u76d8\u7247\u5f0f\u5965\u5c14\u5fb7\u59c6\u8026\u5408\u5668\u4e4b\u524d\uff0c\u4e86\u89e3\u5de5\u5177\u7684\u9759\u7535\u653e\u7535\u9632\u62a4\u7b56\u7565\u3002<\/p>\n

    \u534a\u5bfc\u4f53\u5965\u5c14\u5fb7\u59c6\u8026\u5408\u5668\u89c4\u683c\u68c0\u67e5\u6e05\u5355<\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n
    \u8981\u6c42<\/th>\n\u89c4\u683c<\/th>\n\u7406\u7531<\/th>\n<\/tr>\n<\/thead>\n
    \u5149\u76d8\u6750\u6599<\/td>\n\u8d85\u6d01\u51c0\u7684PEEK\u6216PTFE\u590d\u5408\u6750\u6599<\/td>\n\u4f4e\u9897\u7c92\u7269\u751f\u6210\u3001\u4f4e\u6c14\u4f53\u91ca\u653e\u3001\u8010\u5316\u5b66\u8150\u8680<\/td>\n<\/tr>\n
    \u67a2\u7ebd\u6750\u6599<\/td>\n316L\u4e0d\u9508\u94a2\uff0c\u7535\u629b\u5149<\/td>\n\u8010\u8150\u8680\u6027\u5f3a\uff0c\u5438\u9644\u6c14\u4f53\u5c42\u5c11\uff0c\u9002\u7528\u4e8e\u6d01\u51c0\u5ba4\u7684\u8868\u9762<\/td>\n<\/tr>\n
    \u6c14\u4f53\u91ca\u653e\u8ba4\u8bc1<\/td>\nASTM E595\uff08TML <1.0%\uff0cCVCM <0.1%\uff09<\/td>\n\u771f\u7a7a\u5de5\u827a\u73af\u5883\u6240\u9700<\/td>\n<\/tr>\n
    \u4e2d\u5fc3\u5f0f<\/td>\n\u5939\u94b3\uff08\u5206\u4f53\u5f0f\u5b54\uff09<\/td>\n\u65e0\u8f74\u8868\u9762\u635f\u4f24\uff0c\u540c\u5fc3\u5ea6\u53ef\u91cd\u590d\uff0c\u65e0\u87ba\u9489\u9897\u7c92\u98ce\u9669<\/td>\n<\/tr>\n
    \u6da6\u6ed1<\/td>\n\u65e0\uff08\u7a7a\u8fd0\u884c\uff09<\/td>\n\u6da6\u6ed1\u5242\u84b8\u6c7d\u662f\u6d01\u51c0\u5ba4\u548c\u771f\u7a7a\u73af\u5883\u4e2d\u7684\u4e00\u79cd\u6c61\u67d3\u6e90\u3002<\/td>\n<\/tr>\n
    \u53cd\u5f39<\/td>\n\u96f6\uff080 \u89d2\u5206\u6807\u79f0\u503c\uff09<\/td>\n\u6676\u5706\u5b9a\u4f4d\u7cbe\u5ea6\u8981\u6c42<\/td>\n<\/tr>\n
    \u6e05\u6d01\u517c\u5bb9\u6027<\/td>\n\u5f02\u4e19\u9187\u3001\u53bb\u79bb\u5b50\u6c34\u64e6\u62ed<\/td>\n\u6807\u51c6\u6d01\u51c0\u5ba4\u7ec4\u4ef6\u6e05\u6d01\u7a0b\u5e8f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    \u7ed3\u8bba<\/h2>\n

    \u534a\u5bfc\u4f53\u8bbe\u5907\u662f\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u5728\u5176\u5e94\u7528\u8303\u56f4\u5185\u9047\u5230\u7684\u6280\u672f\u8981\u6c42\u6700\u9ad8\u7684\u8fd0\u884c\u73af\u5883\u3002\u7eb3\u7c73\u7ea7\u5b9a\u4f4d\u8981\u6c42\u3001\u4e9a\u5fae\u7c73\u7ea7\u9897\u7c92\u751f\u6210\u9650\u5236\u3001\u771f\u7a7a\u8131\u6c14\u6807\u51c6\u3001\u9759\u7535\u653e\u7535\u7ba1\u7406\u8981\u6c42\u4ee5\u53ca\u4e25\u82db\u7684\u5316\u5b66\u517c\u5bb9\u6027\u8981\u6c42\uff0c\u4f7f\u5f97\u5927\u591a\u6570\u8054\u8f74\u5668\u7c7b\u578b\u5b8c\u5168\u65e0\u6cd5\u5e94\u7528\u3002\u5965\u5c14\u5fb7\u59c6\u8054\u8f74\u5668\u4e4b\u6240\u4ee5\u80fd\u591f\u901a\u8fc7\u8fd9\u4e9b\u8ba4\u8bc1\u6d41\u7a0b\u2014\u2014\u524d\u63d0\u662f\u5176\u91c7\u7528\u6b63\u786e\u7684\u8d85\u6d01\u51c0PEEK\u76d8\u7247\u3001\u7535\u629b\u5149\u4e0d\u9508\u94a2\u8f6e\u6bc2\u4ee5\u53ca\u7ecf\u8ba4\u8bc1\u7684\u8131\u6c14\u88c5\u7f6e\u2014\u2014\u662f\u56e0\u4e3a\u5176\u5de5\u4f5c\u539f\u7406\u53ef\u5b9e\u73b0\u96f6\u8f74\u627f\u8f7d\u8377\u3001\u96f6\u53cd\u51b2\u548c\u5e72\u8fd0\u8f6c\uff0c\u800c\u8fd9\u4e9b\u7279\u6027\u6070\u597d\u7b26\u5408\u534a\u5bfc\u4f53\u5de5\u827a\u73af\u5883\u7684\u8981\u6c42\u3002\u5728\u8bbe\u8ba1\u9636\u6bb5\u8fdb\u884c\u6b63\u786e\u7684\u89c4\u683c\u9009\u62e9\uff0c\u5176\u5e26\u6765\u7684\u56de\u62a5\u5c06\u662f\u6676\u5706\u635f\u8017\u7684\u663e\u8457\u964d\u4f4e\u3001\u8bbe\u5907\u6b63\u5e38\u8fd0\u884c\u65f6\u95f4\u7684\u5ef6\u957f\u4ee5\u53ca\u6d01\u51c0\u5ba4\u7ef4\u62a4\u6d41\u7a0b\u7684\u7b80\u5316\u3002<\/p>\n

    \u8054\u7cfb\u6211\u4eec \u5de5\u7a0b\u56e2\u961f<\/a> \u5982\u9700\u4e86\u89e3\u534a\u5bfc\u4f53\u7ea7 Oldham \u8026\u5408\u89c4\u683c\uff08\u5305\u62ec\u8131\u6c14\u6587\u6863\uff09\uff0c\u6216\u6d4f\u89c8\u6211\u4eec\u7684 \u7cbe\u5bc6\u8026\u5408\u8303\u56f4<\/a> \u9002\u7528\u4e8e\u6d01\u51c0\u5ba4\u5e94\u7528\u3002<\/p>","protected":false},"excerpt":{"rendered":"

    Semiconductor manufacturing is arguably the most demanding environment in which any mechanical component can be asked to operate. The positioning tolerances required are measured in nanometres. The cleanliness standards \u2014 typically ISO Class 1 to ISO Class 4 cleanrooms \u2014 permit only a handful of particles per cubic metre of air. The chemical environment includes […]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[722],"tags":[892,898,891,895,894,897,896,893,899],"class_list":["post-877","post","type-post","status-publish","format-standard","hentry","category-blog","tag-cleanroom-coupling","tag-iso-cleanroom-coupling","tag-oldham-coupling-semiconductor","tag-outgassing-coupling","tag-peek-coupling-cleanroom","tag-semiconductor-motion-coupling","tag-vacuum-compatible-coupling","tag-wafer-handling-coupling","tag-wafer-robot-coupling"],"_links":{"self":[{"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/posts\/877","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/comments?post=877"}],"version-history":[{"count":0,"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/posts\/877\/revisions"}],"wp:attachment":[{"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/media?parent=877"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/categories?post=877"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/oldhamcoupling.net\/zh\/wp-json\/wp\/v2\/tags?post=877"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}