{"id":877,"date":"2026-06-25T01:55:35","date_gmt":"2026-06-25T01:55:35","guid":{"rendered":"https:\/\/oldhamcoupling.net\/oldham-couplings-in-semiconductor-equipment-wafer-handling-and-cleanroom-motion-systems\/"},"modified":"2026-06-25T01:55:35","modified_gmt":"2026-06-25T01:55:35","slug":"oldham-couplings-in-semiconductor-equipment-wafer-handling-and-cleanroom-motion-systems","status":"publish","type":"post","link":"https:\/\/oldhamcoupling.net\/vi\/oldham-couplings-in-semiconductor-equipment-wafer-handling-and-cleanroom-motion-systems\/","title":{"rendered":"Kh\u1edbp n\u1ed1i Oldham trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn: H\u1ec7 th\u1ed1ng x\u1eed l\u00fd wafer v\u00e0 chuy\u1ec3n \u0111\u1ed9ng trong ph\u00f2ng s\u1ea1ch"},"content":{"rendered":"

S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn c\u00f3 th\u1ec3 n\u00f3i l\u00e0 m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t nh\u1ea5t m\u00e0 b\u1ea5t k\u1ef3 linh ki\u1ec7n c\u01a1 kh\u00ed n\u00e0o ph\u1ea3i ho\u1ea1t \u0111\u1ed9ng. Dung sai \u0111\u1ecbnh v\u1ecb y\u00eau c\u1ea7u \u0111\u01b0\u1ee3c \u0111o b\u1eb1ng nanomet. Ti\u00eau chu\u1ea9n \u0111\u1ed9 s\u1ea1ch \u2013 th\u01b0\u1eddng l\u00e0 ph\u00f2ng s\u1ea1ch ISO Class 1 \u0111\u1ebfn ISO Class 4 \u2013 ch\u1ec9 cho ph\u00e9p m\u1ed9t s\u1ed1 \u00edt h\u1ea1t tr\u00ean m\u1ed7i m\u00e9t kh\u1ed1i kh\u00f4ng kh\u00ed. M\u00f4i tr\u01b0\u1eddng h\u00f3a h\u1ecdc bao g\u1ed3m kh\u00ed x\u1eed l\u00fd \u0103n m\u00f2n, n\u01b0\u1edbc si\u00eau tinh khi\u1ebft v\u00e0 dung m\u00f4i m\u1ea1nh. V\u00e0 h\u1eadu qu\u1ea3 c\u1ee7a s\u1ef1 nhi\u1ec5m b\u1ea9n ho\u1eb7c sai s\u00f3t \u0111\u1ecbnh v\u1ecb kh\u00f4ng ch\u1ec9 l\u00e0 m\u1ed9t khuy\u1ebft \u0111i\u1ec3m v\u1ec1 h\u00ecnh th\u1ee9c m\u00e0 l\u00e0 s\u1ef1 ph\u00e1 h\u1ee7y m\u1ed9t t\u1ea5m silicon tr\u1ecb gi\u00e1 h\u00e0ng ngh\u00ecn \u0111\u00f4 la, ho\u1eb7c l\u00e0m \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn to\u00e0n b\u1ed9 l\u00f4 s\u1ea3n xu\u1ea5t.<\/p>\n

Trong m\u00f4i tr\u01b0\u1eddng n\u00e0y, m\u1ecdi th\u00e0nh ph\u1ea7n c\u01a1 kh\u00ed trong h\u1ec7 th\u1ed1ng chuy\u1ec3n \u0111\u1ed9ng \u0111\u1ec1u \u0111\u01b0\u1ee3c ki\u1ec3m tra k\u1ef9 l\u01b0\u1ee1ng v\u1ec1 kh\u1ea3 n\u0103ng t\u1ea1o h\u1ea1t, s\u1ef1 tho\u00e1t kh\u00ed, t\u00ednh t\u01b0\u01a1ng th\u00edch h\u00f3a h\u1ecdc v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c v\u1ecb tr\u00ed. Kh\u1edbp n\u1ed1i Oldham<\/strong> N\u00f3 v\u01b0\u1ee3t qua \u0111\u01b0\u1ee3c s\u1ef1 ki\u1ec3m tra nghi\u00eam ng\u1eb7t n\u00e0y b\u1edfi v\u00ec s\u1ef1 k\u1ebft h\u1ee3p \u0111\u1ed9c \u0111\u00e1o gi\u1eefa \u0111\u1ed9 r\u01a1 b\u1eb1ng kh\u00f4ng, t\u1ea3i tr\u1ecdng \u1ed5 tr\u1ee5c b\u1eb1ng kh\u00f4ng, c\u00e1ch \u0111i\u1ec7n v\u00e0 kh\u1ea3 n\u0103ng ch\u1ebf t\u1ea1o b\u1eb1ng v\u1eadt li\u1ec7u c\u00f3 \u0111\u1ed9 tho\u00e1t kh\u00ed c\u1ef1c th\u1ea5p, \u0111\u00e1p \u1ee9ng \u0111\u01b0\u1ee3c c\u00e1c y\u00eau c\u1ea7u m\u00e0 kh\u00f4ng lo\u1ea1i kh\u1edbp n\u1ed1i th\u00f4ng th\u01b0\u1eddng n\u00e0o kh\u00e1c c\u00f3 th\u1ec3 \u0111\u00e1p \u1ee9ng \u0111\u1ed3ng th\u1eddi. B\u00e0i vi\u1ebft n\u00e0y xem x\u00e9t c\u00e1c \u1ee9ng d\u1ee5ng c\u1ee5 th\u1ec3, y\u00eau c\u1ea7u v\u1eadt li\u1ec7u v\u00e0 ti\u00eau chu\u1ea9n hi\u1ec7u su\u1ea5t chi ph\u1ed1i th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u1ee7a kh\u1edbp n\u1ed1i Oldham trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n

\n \"Oldham,
Trong m\u00f4i tr\u01b0\u1eddng ph\u00f2ng s\u1ea1ch s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, vi\u1ec7c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u gh\u00e9p n\u1ed1i ph\u1ee5 thu\u1ed9c v\u00e0o t\u1ed1c \u0111\u1ed9 t\u1ea1o h\u1ea1t, m\u1ee9c \u0111\u1ed9 tho\u00e1t kh\u00ed v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch h\u00f3a h\u1ecdc v\u1edbi kh\u00ed x\u1eed l\u00fd v\u00e0 n\u01b0\u1edbc si\u00eau tinh khi\u1ebft \u2014 nh\u1eefng y\u00eau c\u1ea7u m\u00e0 c\u00e1c lo\u1ea1i kh\u1edbp n\u1ed1i c\u00f4ng nghi\u1ec7p ti\u00eau chu\u1ea9n kh\u00f4ng th\u1ec3 \u0111\u00e1p \u1ee9ng.<\/figcaption><\/figure>\n

Th\u1eed th\u00e1ch \u00f4 nhi\u1ec5m ph\u00f2ng s\u1ea1ch<\/h2>\n

M\u1ed9t h\u1ea1t nh\u1ecf h\u01a1n 0,1 micron r\u01a1i xu\u1ed1ng b\u1ec1 m\u1eb7t t\u1ea5m b\u00e1n d\u1eabn trong qu\u00e1 tr\u00ecnh quang kh\u1eafc c\u00f3 th\u1ec3 g\u00e2y ra l\u1ed7i nghi\u00eam tr\u1ecdng trong m\u1ea1ch t\u00edch h\u1ee3p \u0111ang \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o. M\u1ed9t ph\u00e2n t\u1eed h\u1ee3p ch\u1ea5t h\u1eefu c\u01a1 tho\u00e1t kh\u00ed t\u1eeb th\u00e0nh ph\u1ea7n polymer c\u00f3 th\u1ec3 l\u1eafng \u0111\u1ecdng tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m b\u00e1n d\u1eabn v\u00e0 l\u00e0m thay \u0111\u1ed5i n\u0103ng l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t theo nh\u1eefng c\u00e1ch \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn \u0111\u1ed9 b\u00e1m d\u00ednh c\u1ee7a ch\u1ea5t c\u1ea3n quang, \u0111\u1ed9 \u0111\u1ed3ng nh\u1ea5t c\u1ee7a qu\u00e1 tr\u00ecnh kh\u1eafc ho\u1eb7c s\u1ef1 l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng. \u0110\u00e2y kh\u00f4ng ph\u1ea3i l\u00e0 nh\u1eefng v\u1ea5n \u0111\u1ec1 l\u00fd thuy\u1ebft m\u00e0 l\u00e0 nh\u1eefng th\u00e1ch th\u1ee9c qu\u1ea3n l\u00fd \u00f4 nhi\u1ec5m h\u00e0ng ng\u00e0y \u0111\u1ed1i v\u1edbi c\u00e1c k\u1ef9 s\u01b0 quy tr\u00ecnh b\u00e1n d\u1eabn.<\/p>\n

M\u1ecdi th\u00e0nh ph\u1ea7n c\u01a1 kh\u00ed trong quy tr\u00ecnh x\u1eed l\u00fd t\u1ea5m b\u00e1n d\u1eabn \u2014 robot, b\u00e0n tr\u01b0\u1ee3t tuy\u1ebfn t\u00ednh, b\u00e0n tr\u01b0\u1ee3t quay v\u00e0 c\u00e1c kh\u1edbp n\u1ed1i truy\u1ec1n \u0111\u1ed9ng c\u1ee7a ch\u00fang \u2014 \u0111\u1ec1u ph\u1ea3i \u0111\u01b0\u1ee3c \u0111\u00e1nh gi\u00e1 v\u1ec1 c\u00e1c ti\u00eau ch\u00ed sau:<\/p>\n

    \n
  • T\u1ed1c \u0111\u1ed9 t\u1ea1o h\u1ea1t:<\/strong> Trong \u0111i\u1ec1u ki\u1ec7n ho\u1ea1t \u0111\u1ed9ng b\u00ecnh th\u01b0\u1eddng, linh ki\u1ec7n \u0111\u00f3 th\u1ea3i ra bao nhi\u00eau h\u1ea1t c\u00f3 k\u00edch th\u01b0\u1edbc x\u00e1c \u0111\u1ecbnh m\u1ed7i \u0111\u01a1n v\u1ecb th\u1eddi gian? \u0110i\u1ec1u n\u00e0y \u0111\u01b0\u1ee3c \u0111o trong bu\u1ed3ng ki\u1ec3m so\u00e1t v\u00e0 \u0111\u01b0\u1ee3c bi\u1ec3u th\u1ecb b\u1eb1ng s\u1ed1 h\u1ea1t m\u1ed7i ph\u00fat tr\u00ean m\u1ed7i \u0111\u01a1n v\u1ecb di\u1ec7n t\u00edch ho\u1eb7c th\u1ec3 t\u00edch.<\/li>\n
  • T\u1ed1c \u0111\u1ed9 tho\u00e1t kh\u00ed:<\/strong> T\u1ed1c \u0111\u1ed9 ph\u00e1t th\u1ea3i h\u1ee3p ch\u1ea5t h\u1eefu c\u01a1 d\u1ec5 bay h\u01a1i (VOC) t\u1eeb linh ki\u1ec7n \u1edf nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng trong \u0111i\u1ec1u ki\u1ec7n ch\u00e2n kh\u00f4ng ho\u1eb7c g\u1ea7n ch\u00e2n kh\u00f4ng l\u00e0 bao nhi\u00eau? \u0110\u01b0\u1ee3c \u0111o b\u1eb1ng Pa\u00b7m\u00b3\/s tr\u00ean m\u1ed9t \u0111\u01a1n v\u1ecb di\u1ec7n t\u00edch, th\u00f4ng s\u1ed1 n\u00e0y quy\u1ebft \u0111\u1ecbnh t\u00ednh ph\u00f9 h\u1ee3p c\u1ee7a v\u1eadt li\u1ec7u \u0111\u1ec3 s\u1eed d\u1ee5ng trong bu\u1ed3ng x\u1eed l\u00fd ch\u00e2n kh\u00f4ng.<\/li>\n
  • Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch h\u00f3a h\u1ecdc:<\/strong> V\u1eadt li\u1ec7u n\u00e0y c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng l\u1ea1i c\u00e1c h\u00f3a ch\u1ea5t c\u00f3 trong v\u00f9ng ho\u1ea1t \u0111\u1ed9ng c\u1ee7a n\u00f3 hay kh\u00f4ng \u2014 h\u01a1i hydro florua, ozon, c\u1ed3n isopropyl, amoni hydroxit, hydro peroxit v\u00e0 c\u00e1c ch\u1ea5t kh\u00e1c t\u00f9y thu\u1ed9c v\u00e0o b\u01b0\u1edbc x\u1eed l\u00fd?<\/li>\n
  • S\u1ef1 nhi\u1ec5m b\u1ea9n ion:<\/strong> V\u1eadt li\u1ec7u n\u00e0y c\u00f3 gi\u1ea3i ph\u00f3ng c\u00e1c ion kim lo\u1ea1i ho\u1eb7c c\u00e1c lo\u1ea1i ion kh\u00e1c c\u00f3 th\u1ec3 l\u1eafng \u0111\u1ecdng tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m b\u00e1n d\u1eabn v\u00e0 l\u00e0m thay \u0111\u1ed5i \u0111\u1eb7c t\u00ednh \u0111i\u1ec7n c\u1ee7a thi\u1ebft b\u1ecb kh\u00f4ng?<\/li>\n<\/ul>\n

    V\u00ec sao \u0111\u0129a tr\u01b0\u1ee3t c\u1ee7a kh\u1edbp n\u1ed1i Oldham v\u1eeba l\u00e0 th\u00e1ch th\u1ee9c v\u1eeba l\u00e0 gi\u1ea3i ph\u00e1p<\/h2>\n

    Chuy\u1ec3n \u0111\u1ed9ng tr\u01b0\u1ee3t c\u1ee7a \u0111\u0129a trung t\u00e2m l\u00e0 ngu\u1ed3n g\u1ed1c kh\u1ea3 n\u0103ng b\u00f9 sai l\u1ec7ch c\u1ee7a kh\u1edbp n\u1ed1i Oldham \u2014 nh\u01b0ng n\u00f3 c\u0169ng l\u00e0 ngu\u1ed3n ti\u1ec1m t\u00e0ng t\u1ea1o ra c\u00e1c h\u1ea1t b\u1ee5i. M\u1ed7i \u0111i\u1ec3m ti\u1ebfp x\u00fac tr\u01b0\u1ee3t \u0111\u1ec1u t\u1ea1o ra c\u00e1c m\u1ea3nh v\u1ee5n m\u00e0i m\u00f2n, v\u00e0 trong m\u00f4i tr\u01b0\u1eddng ph\u00f2ng s\u1ea1ch, c\u00e1c h\u1ea1t b\u1ee5i n\u00e0y c\u1ea7n \u0111\u01b0\u1ee3c x\u1eed l\u00fd.<\/p>\n

    Y\u1ebfu t\u1ed1 then ch\u1ed1t n\u1eb1m \u1edf vi\u1ec7c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u. Acetat ti\u00eau chu\u1ea9n t\u1ea1o ra c\u00e1c h\u1ea1t c\u00f3 th\u1ec3 \u0111o \u0111\u01b0\u1ee3c trong qu\u00e1 tr\u00ecnh ho\u1ea1t \u0111\u1ed9ng, m\u1ee9c \u0111\u1ed9 ch\u1ea5p nh\u1eadn \u0111\u01b0\u1ee3c trong m\u00f4i tr\u01b0\u1eddng c\u00f4ng nghi\u1ec7p nh\u01b0ng l\u1ea1i qu\u00e1 cao v\u1ec1 s\u1ed1 l\u01b0\u1ee3ng v\u00e0 k\u00edch th\u01b0\u1edbc h\u1ea1t \u0111\u1ed1i v\u1edbi ph\u00f2ng s\u1ea1ch \u0111\u1ea1t ti\u00eau chu\u1ea9n ISO Class 3 ho\u1eb7c cao h\u01a1n. PEEK, \u0111\u1eb7c bi\u1ec7t l\u00e0 PEEK \u0111\u01b0\u1ee3c gia c\u01b0\u1eddng b\u1eb1ng PTFE ho\u1eb7c s\u1ee3i carbon, t\u1ea1o ra \u00edt h\u1ea1t h\u01a1n \u0111\u00e1ng k\u1ec3 v\u00e0 k\u00edch th\u01b0\u1edbc h\u1ea1t nh\u1ecf h\u01a1n trong c\u00f9ng \u0111i\u1ec1u ki\u1ec7n tr\u01b0\u1ee3t, v\u1edbi s\u1ef1 ph\u00e2n b\u1ed1 k\u00edch th\u01b0\u1edbc h\u1ea1t ph\u00f9 h\u1ee3p h\u01a1n v\u1edbi c\u00e1c ti\u00eau chu\u1ea9n ph\u00e2n lo\u1ea1i ph\u00f2ng s\u1ea1ch.<\/p>\n

    \u0110\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn \u0111\u00f2i h\u1ecfi kh\u1eaft khe nh\u1ea5t \u2014 b\u00ean trong bu\u1ed3ng x\u1eed l\u00fd ho\u1eb7c trong m\u00f4i tr\u01b0\u1eddng ISO Lo\u1ea1i 1 \u0111\u1ebfn 2 \u2014 c\u00e1c lo\u1ea1i PEEK si\u00eau s\u1ea1ch v\u1edbi \u0111\u1ed9 tinh khi\u1ebft \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t (h\u00e0m l\u01b0\u1ee3ng ion kim lo\u1ea1i th\u1ea5p, kh\u00f4ng c\u00f3 ch\u1ea5t d\u1ebbo h\u00f3a ho\u1eb7c ch\u1ea5t \u0111\u1ed9n c\u00f3 th\u1ec3 g\u00e2y tho\u00e1t kh\u00ed) \u0111\u01b0\u1ee3c ch\u1ec9 \u0111\u1ecbnh. C\u00e1c v\u1eadt li\u1ec7u n\u00e0y \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t trong \u0111i\u1ec1u ki\u1ec7n \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t v\u1edbi s\u1ef1 nh\u1ea5t qu\u00e1n \u0111\u01b0\u1ee3c ghi ch\u00e9p \u0111\u1ea7y \u0111\u1ee7 gi\u1eefa c\u00e1c l\u00f4 v\u1ec1 t\u1ef7 l\u1ec7 tho\u00e1t kh\u00ed v\u00e0 h\u1ed3 s\u01a1 t\u1ea1o h\u1ea1t. Chi ph\u00ed cao h\u01a1n \u0111\u00e1ng k\u1ec3 so v\u1edbi PEEK ti\u00eau chu\u1ea9n, nh\u01b0ng g\u00f3i d\u1eef li\u1ec7u ch\u1ee9ng nh\u1eadn \u0111i k\u00e8m l\u00e0 r\u1ea5t c\u1ea7n thi\u1ebft cho c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb \u0111ang t\u00ecm ki\u1ebfm s\u1ef1 ch\u1ea5p thu\u1eadn c\u00f4ng c\u1ee5 x\u1eed l\u00fd t\u1eeb c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t chip.<\/p>\n

    C\u00e1c kh\u1edbp robot x\u1eed l\u00fd wafer<\/h2>\n

    Robot x\u1eed l\u00fd wafer trong m\u00f4i tr\u01b0\u1eddng kh\u00ed quy\u1ec3n \u2014 c\u00e1c robot SCARA v\u00e0 Cartesian d\u00f9ng \u0111\u1ec3 v\u1eadn chuy\u1ec3n wafer gi\u1eefa c\u00e1c khay, bu\u1ed3ng kh\u00f3a t\u1ea3i v\u00e0 bu\u1ed3ng x\u1eed l\u00fd \u2014 c\u00f3 nhi\u1ec1u kh\u1edbp quay, m\u1ed7i kh\u1edbp \u0111\u01b0\u1ee3c \u0111i\u1ec1u khi\u1ec3n b\u1edfi m\u1ed9t \u0111\u1ed9ng c\u01a1 servo th\u00f4ng qua b\u1ed9 truy\u1ec1n \u0111\u1ed9ng h\u00e0i h\u00f2a ho\u1eb7c b\u1ed9 gi\u1ea3m t\u1ed1c. Trong h\u1ea7u h\u1ebft c\u00e1c thi\u1ebft k\u1ebf hi\u1ec7n \u0111\u1ea1i, kh\u1edbp n\u1ed1i gi\u1eefa tr\u1ee5c \u0111\u1ea7u ra c\u1ee7a \u0111\u1ed9ng c\u01a1 v\u00e0 \u0111\u1ea7u v\u00e0o c\u1ee7a b\u1ed9 truy\u1ec1n \u0111\u1ed9ng h\u00e0i h\u00f2a l\u00e0 kh\u1edbp n\u1ed1i Oldham.<\/p>\n

    C\u00e1c y\u00eau c\u1ea7u \u1edf \u0111\u00e2y r\u1ea5t kh\u1eaft khe. Robot ph\u1ea3i \u0111\u1ecbnh v\u1ecb m\u1ed9t t\u1ea5m wafer 300 mm v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c \u00b10,1 mm t\u1ea1i khe v\u00e0o bu\u1ed3ng x\u1eed l\u00fd, l\u1eb7p \u0111i l\u1eb7p l\u1ea1i h\u00e0ng tri\u1ec7u l\u1ea7n trong su\u1ed1t v\u00f2ng \u0111\u1eddi ho\u1ea1t \u0111\u1ed9ng c\u1ee7a thi\u1ebft b\u1ecb. B\u1ea5t k\u1ef3 \u0111\u1ed9 r\u01a1 n\u00e0o t\u1ea1i kh\u1edbp n\u1ed1i \u0111\u1ec1u t\u1ea1o ra sai s\u1ed1 \u0111\u1ecbnh v\u1ecb \u0111\u1ea7u cu\u1ed1i, \u0111\u01b0\u1ee3c khu\u1ebfch \u0111\u1ea1i b\u1edfi chu\u1ed7i \u0111\u1ed9ng h\u1ecdc c\u1ee7a robot. \u0110\u1ed9 r\u01a1 b\u1eb1ng kh\u00f4ng t\u1ea1i m\u1ecdi kh\u1edbp n\u1ed1i l\u00e0 y\u00eau c\u1ea7u kh\u00f4ng th\u1ec3 th\u01b0\u01a1ng l\u01b0\u1ee3ng.<\/p>\n

    Kh\u1ea3 n\u0103ng dung sai l\u1ec7ch ngang c\u1ee7a kh\u1edbp n\u1ed1i Oldham h\u1ea5p th\u1ee5 c\u00e1c sai l\u1ec7ch tr\u1ee5c nh\u1ecf nh\u01b0ng kh\u00f4ng th\u1ec3 tr\u00e1nh kh\u1ecfi gi\u1eefa \u0111\u1ed9ng c\u01a1 v\u00e0 b\u1ed9 truy\u1ec1n \u0111\u1ed9ng h\u00e0i trong c\u1ee5m kh\u1edbp n\u1ed1i nh\u1ecf g\u1ecdn, x\u1ebfp ch\u1ed3ng l\u00ean nhau \u2014 nh\u1eefng sai l\u1ec7ch kh\u00f4ng th\u1ec3 kh\u1eafc ph\u1ee5c b\u1eb1ng c\u00e1ch ch\u00eam th\u00eam mi\u1ebfng \u0111\u1ec7m trong kh\u00f4ng gian h\u1ea1n h\u1eb9p c\u1ee7a v\u1ecf kh\u1edbp n\u1ed1i robot. Gi\u1ea3i ph\u00e1p thay th\u1ebf \u2014 kh\u1edbp n\u1ed1i ki\u1ec3u \u1ed1ng th\u1ed5i \u2014 s\u1ebd t\u1ea1o ra t\u1ea3i tr\u1ecdng h\u01b0\u1edbng t\u00e2m l\u00ean \u1ed5 tr\u1ee5c \u0111\u1ea7u v\u00e0o c\u1ee7a b\u1ed9 truy\u1ec1n \u0111\u1ed9ng h\u00e0i, l\u00e0m gi\u1ea3m tu\u1ed5i th\u1ecd c\u1ee7a b\u1ed9 ph\u1eadn n\u00e0y, v\u1ed1n r\u1ea5t t\u1ed1n k\u00e9m v\u00e0 m\u1ea5t th\u1eddi gian \u0111\u1ec3 thay th\u1ebf trong m\u1ed9t robot c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c l\u1eafp \u0111\u1eb7t trong m\u1ed9t c\u00f4ng c\u1ee5 x\u1eed l\u00fd theo h\u1ee3p \u0111\u1ed3ng b\u1ea3o tr\u00ec nhi\u1ec1u n\u0103m.<\/p>\n

    \n \"Kh\u1edbp
    Trong c\u00e1c kh\u1edbp robot x\u1eed l\u00fd t\u1ea5m b\u00e1n d\u1eabn, \u0111\u1ed9 r\u01a1 b\u1eb1ng kh\u00f4ng v\u00e0 t\u1ea3i tr\u1ecdng \u1ed5 tr\u1ee5c h\u01b0\u1edbng t\u00e2m b\u1eb1ng kh\u00f4ng \u0111\u1ec1u quan tr\u1ecdng nh\u01b0 nhau \u2014 kh\u1edbp n\u1ed1i Oldham \u0111\u00e1p \u1ee9ng c\u1ea3 hai y\u00eau c\u1ea7u n\u00e0y trong m\u1ed9t thi\u1ebft k\u1ebf nh\u1ecf g\u1ecdn c\u1ee7a c\u1ee5m kh\u1edbp robot x\u1ebfp ch\u1ed3ng.<\/figcaption><\/figure>\n

    B\u00e0n tr\u01b0\u1ee3t tuy\u1ebfn t\u00ednh ch\u00ednh x\u00e1c<\/h2>\n

    C\u00e1c m\u00e1y kh\u1eafc quang h\u1ecdc, m\u00e1y qu\u00e9t, h\u1ec7 th\u1ed1ng ki\u1ec3m tra wafer v\u00e0 c\u00e1c c\u00f4ng c\u1ee5 \u0111o l\u01b0\u1eddng s\u1eed d\u1ee5ng c\u00e1c b\u00e0n tr\u01b0\u1ee3t tuy\u1ebfn t\u00ednh si\u00eau ch\u00ednh x\u00e1c v\u1edbi \u0111\u1ed9 ph\u00e2n gi\u1ea3i \u0111\u1ecbnh v\u1ecb trong ph\u1ea1m vi nanomet. B\u00e0n tr\u01b0\u1ee3t \u0111\u01b0\u1ee3c \u0111i\u1ec1u khi\u1ec3n b\u1edfi m\u1ed9t \u0111\u1ed9ng c\u01a1 tuy\u1ebfn t\u00ednh ho\u1eb7c v\u00edt me bi, v\u1edbi v\u00f2ng \u0111i\u1ec1u khi\u1ec3n servo \u0111\u00f3ng l\u1ea1i d\u1ef1a tr\u00ean t\u00edn hi\u1ec7u t\u1eeb m\u00e1y \u0111o giao thoa laser ho\u1eb7c b\u1ed9 m\u00e3 h\u00f3a quang h\u1ecdc. B\u1ea5t k\u1ef3 s\u1ef1 bi\u1ebfn d\u1ea1ng c\u01a1 h\u1ecdc ho\u1eb7c \u0111\u1ed9 r\u01a1 n\u00e0o trong chu\u1ed7i truy\u1ec1n \u0111\u1ed9ng \u0111\u1ec1u tr\u1ef1c ti\u1ebfp xu\u1ea5t hi\u1ec7n d\u01b0\u1edbi d\u1ea1ng l\u1ed7i v\u1ecb tr\u00ed trong v\u00f2ng ph\u1ea3n h\u1ed3i.<\/p>\n

    Trong c\u00e1c b\u00e0n tr\u01b0\u1ee3t ch\u00ednh x\u00e1c d\u1eabn \u0111\u1ed9ng b\u1eb1ng v\u00edt me bi, kh\u1edbp n\u1ed1i Oldham gi\u1eefa \u0111\u1ed9ng c\u01a1 servo v\u00e0 v\u00edt me bi c\u00f3 ch\u1ee9c n\u0103ng t\u01b0\u01a1ng t\u1ef1 nh\u01b0 trong b\u1ea5t k\u1ef3 m\u00e1y CNC n\u00e0o \u2014 truy\u1ec1n m\u00f4-men xo\u1eafn kh\u00f4ng c\u00f3 \u0111\u1ed9 r\u01a1 v\u1edbi kh\u1ea3 n\u0103ng b\u00f9 l\u1ec7ch ngang \u2014 nh\u01b0ng v\u1edbi ti\u00eau chu\u1ea9n hi\u1ec7u su\u1ea5t cao h\u01a1n. Kh\u1edbp n\u1ed1i ph\u1ea3i duy tr\u00ec \u0111\u1ed9 r\u01a1 b\u1eb1ng kh\u00f4ng trong su\u1ed1t v\u00f2ng \u0111\u1eddi ho\u1ea1t \u0111\u1ed9ng \u0111\u01b0\u1ee3c ch\u1ee9ng nh\u1eadn c\u1ee7a b\u00e0n tr\u01b0\u1ee3t, th\u01b0\u1eddng l\u00e0 5 \u0111\u1ebfn 10 n\u0103m s\u1eed d\u1ee5ng h\u00e0ng ng\u00e0y, v\u1edbi vi\u1ec7c thay th\u1ebf \u0111\u0129a \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n nh\u01b0 m\u1ed9t ph\u1ea7n c\u1ee7a l\u1ecbch b\u1ea3o tr\u00ec \u0111\u1ecbnh k\u1ef3 c\u1ee7a b\u00e0n tr\u01b0\u1ee3t. C\u00e1c kh\u1edbp n\u1ed1i Oldham c\u1ea5p \u0111\u1ed9 ch\u00ednh x\u00e1c cho c\u00e1c \u1ee9ng d\u1ee5ng n\u00e0y \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t v\u1edbi dung sai chi\u1ec1u r\u1ed9ng m\u1ed9ng ch\u1eb7t ch\u1ebd h\u01a1n so v\u1edbi c\u00e1c kh\u1edbp n\u1ed1i c\u00f4ng nghi\u1ec7p ti\u00eau chu\u1ea9n, gi\u1ea3m thi\u1ec3u \u0111\u1ed9 r\u01a1 ban \u0111\u1ea7u do t\u00edch l\u0169y dung sai l\u1eafp r\u00e1p.<\/p>\n

    Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng: M\u1ed9t y\u00eau c\u1ea7u b\u1ed5 sung quan tr\u1ecdng<\/h2>\n

    Nhi\u1ec1u b\u01b0\u1edbc trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn di\u1ec5n ra trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng \u2014 l\u1eafng \u0111\u1ecdng h\u01a1i v\u1eadt l\u00fd, l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc, c\u1ea5y ion v\u00e0 c\u00e1c quy tr\u00ecnh kh\u1eafc \u0111\u1ec1u ho\u1ea1t \u0111\u1ed9ng \u1edf \u00e1p su\u1ea5t t\u1eeb \u200b\u200b\u00e1p su\u1ea5t kh\u00ed quy\u1ec3n xu\u1ed1ng \u0111\u1ebfn 10\u207b\u2079 Torr. C\u00e1c b\u1ed9 ph\u1eadn c\u01a1 kh\u00ed trong ho\u1eb7c g\u1ea7n bu\u1ed3ng ch\u00e2n kh\u00f4ng kh\u00f4ng \u0111\u01b0\u1ee3c ph\u00e9p tho\u00e1t kh\u00ed v\u1edbi t\u1ed1c \u0111\u1ed9 l\u00e0m \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn \u0111\u1ed9 ch\u00e2n kh\u00f4ng c\u1ee7a quy tr\u00ecnh.<\/p>\n

    C\u00e1c v\u1eadt li\u1ec7u polymer ti\u00eau chu\u1ea9n \u2014 bao g\u1ed3m acetal, nylon lo\u1ea1i ti\u00eau chu\u1ea9n v\u00e0 th\u1eadm ch\u00ed c\u1ea3 PEEK ti\u00eau chu\u1ea9n \u2014 ch\u1ee9a c\u00e1c monome d\u01b0, ch\u1ea5t l\u00e0m d\u1ebbo v\u00e0 ch\u1ea5t h\u1ed7 tr\u1ee3 x\u1eed l\u00fd, ch\u00fang s\u1ebd tho\u00e1t kh\u00ed trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng v\u1edbi t\u1ed1c \u0111\u1ed9 kh\u00f4ng th\u1ec3 ch\u1ea5p nh\u1eadn \u0111\u01b0\u1ee3c \u0111\u1ed1i v\u1edbi c\u00e1c quy tr\u00ecnh b\u00e1n d\u1eabn ch\u00e2n kh\u00f4ng cao. C\u00e1c lo\u1ea1i PEEK t\u01b0\u01a1ng th\u00edch v\u1edbi ch\u00e2n kh\u00f4ng \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t v\u1edbi t\u1ed1c \u0111\u1ed9 tho\u00e1t kh\u00ed \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t, th\u01b0\u1eddng \u0111\u00e1p \u1ee9ng c\u00e1c ti\u00eau chu\u1ea9n tho\u00e1t kh\u00ed c\u1ee7a NASA (ASTM E595): t\u1ed5ng kh\u1ed1i l\u01b0\u1ee3ng m\u1ea5t \u0111i d\u01b0\u1edbi 1,0 ph\u1ea7n tr\u0103m v\u00e0 l\u01b0\u1ee3ng v\u1eadt li\u1ec7u ng\u01b0ng t\u1ee5 d\u1ec5 bay h\u01a1i thu \u0111\u01b0\u1ee3c d\u01b0\u1edbi 0,1 ph\u1ea7n tr\u0103m sau 24 gi\u1edd \u1edf 125\u00b0C trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng.<\/p>\n

    \u0110\u1ed1i v\u1edbi c\u00e1c kh\u1edbp n\u1ed1i Oldham \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng, h\u00e3y ch\u1ec9 \u0111\u1ecbnh v\u1eadt li\u1ec7u \u0111\u0129a c\u00f3 d\u1eef li\u1ec7u v\u1ec1 s\u1ef1 tho\u00e1t kh\u00ed \u0111\u01b0\u1ee3c nh\u00e0 s\u1ea3n xu\u1ea5t ghi l\u1ea1i. C\u00e1c kh\u1edbp n\u1ed1i ti\u00eau chu\u1ea9n trong danh m\u1ee5c kh\u00f4ng \u0111\u01b0\u1ee3c x\u1ebfp h\u1ea1ng ch\u00e2n kh\u00f4ng; c\u00e1c phi\u00ean b\u1ea3n t\u01b0\u01a1ng th\u00edch v\u1edbi ch\u00e2n kh\u00f4ng y\u00eau c\u1ea7u ch\u1ee9ng nh\u1eadn v\u1eadt li\u1ec7u c\u1ee5 th\u1ec3 v\u00e0 th\u01b0\u1eddng ph\u1ea3i tr\u1ea3i qua c\u00e1c quy tr\u00ecnh nung n\u00f3ng tr\u01b0\u1edbc khi l\u1eafp \u0111\u1eb7t trong m\u00f4i tr\u01b0\u1eddng bu\u1ed3ng x\u1eed l\u00fd. V\u1eadt li\u1ec7u tr\u1ee5c cho c\u00e1c \u1ee9ng d\u1ee5ng ch\u00e2n kh\u00f4ng th\u01b0\u1eddng l\u00e0 th\u00e9p kh\u00f4ng g\u1ec9 304 ho\u1eb7c 316L v\u1edbi b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng \u0111i\u1ec7n h\u00f3a \u2014 t\u1ef7 l\u1ec7 di\u1ec7n t\u00edch b\u1ec1 m\u1eb7t tr\u00ean th\u1ec3 t\u00edch th\u1ea5p c\u1ee7a b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng gi\u00fap gi\u1ea3m thi\u1ec3u l\u1edbp kh\u00ed h\u1ea5p ph\u1ee5 s\u1ebd tho\u00e1t ra trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng.<\/p>\n

    C\u00e1c y\u1ebfu t\u1ed1 \u0111i\u1ec7n c\u1ea7n xem x\u00e9t trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/h2>\n

    C\u00e1c t\u1ea5m b\u00e1n d\u1eabn r\u1ea5t nh\u1ea1y c\u1ea3m v\u1edbi t\u0129nh \u0111i\u1ec7n \u2014 s\u1ef1 t\u00edch t\u1ee5 \u0111i\u1ec7n t\u00edch tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd c\u00f3 th\u1ec3 l\u00e0m h\u1ecfng l\u1edbp oxit c\u1ed5ng b\u1eb1ng c\u00e1c s\u1ef1 ki\u1ec7n ph\u00f3ng \u0111i\u1ec7n t\u0129nh (ESD) m\u00e0 kh\u00f4ng \u0111\u1ec3 l\u1ea1i d\u1ea5u v\u1ebft nh\u00ecn th\u1ea5y \u0111\u01b0\u1ee3c nh\u01b0ng l\u1ea1i ph\u00e1 h\u1ee7y ch\u1ee9c n\u0103ng c\u1ee7a thi\u1ebft b\u1ecb. Vi\u1ec7c n\u1ed1i \u0111\u1ea5t thi\u1ebft b\u1ecb v\u00e0 qu\u1ea3n l\u00fd t\u0129nh \u0111i\u1ec7n l\u00e0 nh\u1eefng l\u0129nh v\u1ef1c k\u1ef9 thu\u1eadt ri\u00eang bi\u1ec7t trong thi\u1ebft k\u1ebf c\u00f4ng c\u1ee5 b\u00e1n d\u1eabn.<\/p>\n

    \u0110\u1eb7c t\u00ednh c\u00e1ch \u0111i\u1ec7n c\u1ee7a kh\u1edbp n\u1ed1i Oldham \u2014 \u0111\u01b0\u1ee3c cung c\u1ea5p b\u1edfi \u0111\u0129a polymer kh\u00f4ng d\u1eabn \u0111i\u1ec7n \u2014 ng\u0103n d\u00f2ng \u0111i\u1ec7n tr\u1ee5c sinh ra do vi\u1ec7c chuy\u1ec3n m\u1ea1ch c\u1ee7a b\u1ed9 truy\u1ec1n \u0111\u1ed9ng servo lan truy\u1ec1n qua chu\u1ed7i truy\u1ec1n \u0111\u1ed9ng v\u00e0o c\u1ea5u tr\u00fac robot v\u00e0 c\u00f3 kh\u1ea3 n\u0103ng \u0111\u1ebfn t\u1ea5m b\u00e1n d\u1eabn. Trong m\u1ed9t s\u1ed1 thi\u1ebft k\u1ebf c\u00f4ng c\u1ee5, s\u1ef1 c\u00e1ch \u0111i\u1ec7n n\u00e0y \u0111\u01b0\u1ee3c c\u1ed1 \u00fd thi\u1ebft k\u1ebf v\u00e0o h\u1ec7 th\u1ed1ng truy\u1ec1n \u0111\u1ed9ng b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng kh\u1edbp n\u1ed1i Oldham \u0111\u1ec3 ng\u1eaft m\u1ea1ch \u0111i\u1ec7n gi\u1eefa b\u1ed9 khu\u1ebfch \u0111\u1ea1i servo v\u00e0 \u0111\u1ea7u cu\u1ed1i d\u1eabn \u0111i\u1ec7n c\u1ee7a robot c\u0169ng nh\u01b0 c\u00e1c b\u1ec1 m\u1eb7t x\u1eed l\u00fd t\u1ea5m b\u00e1n d\u1eabn.<\/p>\n

    Ng\u01b0\u1ee3c l\u1ea1i, trong c\u00e1c d\u1ee5ng c\u1ee5 m\u00e0 c\u1ea5u tr\u00fac robot ph\u1ea3i \u0111\u01b0\u1ee3c n\u1ed1i \u0111\u1ea5t to\u00e0n b\u1ed9 \u0111\u1ec3 qu\u1ea3n l\u00fd ESD, m\u1ed9t kh\u1edbp n\u1ed1i kim lo\u1ea1i \u0111\u01b0\u1ee3c ch\u1ec9 \u0111\u1ecbnh \u0111\u1ec3 duy tr\u00ec t\u00ednh li\u00ean t\u1ee5c c\u1ee7a \u0111i\u1ec7n. Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u1ee7a kh\u1edbp n\u1ed1i ph\u1ea3i ph\u00f9 h\u1ee3p v\u1edbi ki\u1ebfn \u200b\u200btr\u00fac n\u1ed1i \u0111\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb, \u0111i\u1ec1u n\u00e0y \u0111\u00f2i h\u1ecfi ph\u1ea3i hi\u1ec3u chi\u1ebfn l\u01b0\u1ee3c qu\u1ea3n l\u00fd ESD c\u1ee7a d\u1ee5ng c\u1ee5 tr\u01b0\u1edbc khi l\u1ef1a ch\u1ecdn gi\u1eefa kh\u1edbp n\u1ed1i Oldham d\u1ea1ng \u0111\u0129a polymer v\u00e0 d\u1ea1ng \u0111\u0129a kim lo\u1ea1i.<\/p>\n

    Danh s\u00e1ch ki\u1ec3m tra th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt cho c\u00e1c kh\u1edbp n\u1ed1i Oldham b\u00e1n d\u1eabn<\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n
    Y\u00eau c\u1ea7u<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\nL\u00fd do<\/th>\n<\/tr>\n<\/thead>\n
    V\u1eadt li\u1ec7u \u0111\u0129a<\/td>\nV\u1eadt li\u1ec7u composite PEEK ho\u1eb7c PTFE si\u00eau s\u1ea1ch<\/td>\n\u00cdt ph\u00e1t sinh h\u1ea1t, \u00edt tho\u00e1t kh\u00ed, kh\u00e1ng h\u00f3a ch\u1ea5t<\/td>\n<\/tr>\n
    V\u1eadt li\u1ec7u tr\u1ee5c<\/td>\nTh\u00e9p kh\u00f4ng g\u1ec9 316L, \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng \u0111i\u1ec7n h\u00f3a.<\/td>\nKh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n, l\u1edbp kh\u00ed h\u1ea5p ph\u1ee5 th\u1ea5p, b\u1ec1 m\u1eb7t ph\u00f9 h\u1ee3p v\u1edbi ph\u00f2ng s\u1ea1ch.<\/td>\n<\/tr>\n
    Ch\u1ee9ng nh\u1eadn tho\u00e1t kh\u00ed<\/td>\nASTM E595 (TML <1,0%, CVCM <0,1%)<\/td>\nC\u1ea7n thi\u1ebft cho m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd ch\u00e2n kh\u00f4ng<\/td>\n<\/tr>\n
    Ki\u1ec3u trung t\u00e2m<\/td>\nK\u1eb9p (l\u1ed7 chia \u0111\u00f4i)<\/td>\nKh\u00f4ng g\u00e2y h\u01b0 h\u1ea1i b\u1ec1 m\u1eb7t tr\u1ee5c, \u0111\u1ed9 \u0111\u1ed3ng t\u00e2m l\u1eb7p l\u1ea1i, kh\u00f4ng c\u00f3 nguy c\u01a1 h\u1ea1t v\u00edt \u0111\u1ecbnh v\u1ecb.<\/td>\n<\/tr>\n
    B\u00f4i tr\u01a1n<\/td>\nKh\u00f4ng c\u00f3 g\u00ec (ch\u1ea1y kh\u00f4)<\/td>\nH\u01a1i ch\u1ea5t b\u00f4i tr\u01a1n l\u00e0 m\u1ed9t ngu\u1ed3n g\u00e2y \u00f4 nhi\u1ec5m trong m\u00f4i tr\u01b0\u1eddng ph\u00f2ng s\u1ea1ch v\u00e0 ch\u00e2n kh\u00f4ng.<\/td>\n<\/tr>\n
    Ph\u1ea3n \u1ee9ng d\u1eef d\u1ed9i<\/td>\nKh\u00f4ng (0 ph\u00fat cung theo \u0111\u1ecbnh m\u1ee9c)<\/td>\nY\u00eau c\u1ea7u v\u1ec1 \u0111\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh v\u1ecb t\u1ea5m b\u00e1n d\u1eabn<\/td>\n<\/tr>\n
    Kh\u1ea3 n\u0103ng l\u00e0m s\u1ea1ch<\/td>\nLau ch\u00f9i b\u1eb1ng c\u1ed3n IPA v\u00e0 n\u01b0\u1edbc kh\u1eed ion.<\/td>\nQuy tr\u00ecnh l\u00e0m s\u1ea1ch linh ki\u1ec7n ph\u00f2ng s\u1ea1ch ti\u00eau chu\u1ea9n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    Ph\u1ea7n k\u1ebft lu\u1eadn<\/h2>\n

    Thi\u1ebft b\u1ecb b\u00e1n d\u1eabn \u0111\u1ea1i di\u1ec7n cho m\u00f4i tr\u01b0\u1eddng v\u1eadn h\u00e0nh \u0111\u00f2i h\u1ecfi k\u1ef9 thu\u1eadt cao nh\u1ea5t m\u00e0 kh\u1edbp n\u1ed1i Oldham g\u1eb7p ph\u1ea3i trong to\u00e0n b\u1ed9 ph\u1ea1m vi \u1ee9ng d\u1ee5ng c\u1ee7a n\u00f3. S\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa c\u00e1c y\u00eau c\u1ea7u \u0111\u1ecbnh v\u1ecb \u1edf m\u1ee9c nanomet, gi\u1edbi h\u1ea1n t\u1ea1o h\u1ea1t d\u01b0\u1edbi micromet, ti\u00eau chu\u1ea9n kh\u1eed kh\u00ed ch\u00e2n kh\u00f4ng, y\u00eau c\u1ea7u qu\u1ea3n l\u00fd t\u0129nh \u0111i\u1ec7n (ESD) v\u00e0 c\u00e1c y\u00eau c\u1ea7u v\u1ec1 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch h\u00f3a h\u1ecdc kh\u1eaft khe s\u1ebd lo\u1ea1i b\u1ecf h\u1ea7u h\u1ebft c\u00e1c lo\u1ea1i kh\u1edbp n\u1ed1i kh\u1ecfi danh s\u00e1ch xem x\u00e9t. Kh\u1edbp n\u1ed1i Oldham v\u01b0\u1ee3t qua \u0111\u01b0\u1ee3c qu\u00e1 tr\u00ecnh ki\u1ec3m \u0111\u1ecbnh n\u00e0y \u2014 khi \u0111\u01b0\u1ee3c ch\u1ec9 \u0111\u1ecbnh v\u1edbi \u0111\u0129a PEEK si\u00eau s\u1ea1ch ch\u00ednh x\u00e1c, c\u00e1c tr\u1ee5c b\u1eb1ng th\u00e9p kh\u00f4ng g\u1ec9 \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng \u0111i\u1ec7n h\u00f3a v\u00e0 ch\u1ee9ng nh\u1eadn kh\u1eed kh\u00ed \u0111\u01b0\u1ee3c ghi ch\u00e9p \u0111\u1ea7y \u0111\u1ee7 \u2014 b\u1edfi v\u00ec nguy\u00ean t\u1eafc ho\u1ea1t \u0111\u1ed9ng c\u1ee7a n\u00f3 t\u1ea1o ra t\u1ea3i tr\u1ecdng \u1ed5 tr\u1ee5c b\u1eb1ng kh\u00f4ng, \u0111\u1ed9 r\u01a1 b\u1eb1ng kh\u00f4ng v\u00e0 ho\u1ea1t \u0111\u1ed9ng kh\u00f4, t\u1ea5t c\u1ea3 \u0111\u1ec1u ho\u00e0n to\u00e0n ph\u00f9 h\u1ee3p v\u1edbi nh\u1eefng g\u00ec m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd b\u00e1n d\u1eabn y\u00eau c\u1ea7u. Kho\u1ea3n \u0111\u1ea7u t\u01b0 k\u1ef9 thu\u1eadt v\u00e0o vi\u1ec7c ch\u1ec9 \u0111\u1ecbnh ch\u00ednh x\u00e1c \u1edf giai \u0111o\u1ea1n thi\u1ebft k\u1ebf \u0111\u01b0\u1ee3c \u0111\u1ec1n \u0111\u00e1p nhi\u1ec1u l\u1ea7n nh\u1edd gi\u1ea3m t\u1ed5n th\u1ea5t wafer, k\u00e9o d\u00e0i th\u1eddi gian ho\u1ea1t \u0111\u1ed9ng c\u1ee7a thi\u1ebft b\u1ecb v\u00e0 \u0111\u01a1n gi\u1ea3n h\u00f3a c\u00e1c quy tr\u00ecnh b\u1ea3o tr\u00ec ph\u00f2ng s\u1ea1ch.<\/p>\n

    Li\u00ean h\u1ec7 v\u1edbi ch\u00fang t\u00f4i \u0111\u1ed9i ng\u0169 k\u1ef9 thu\u1eadt<\/a> \u0110\u1ec3 bi\u1ebft th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt v\u1ec1 kh\u1edbp n\u1ed1i Oldham c\u1ea5p b\u00e1n d\u1eabn, bao g\u1ed3m c\u1ea3 t\u00e0i li\u1ec7u v\u1ec1 qu\u00e1 tr\u00ecnh tho\u00e1t kh\u00ed, ho\u1eb7c xem th\u00eam th\u00f4ng tin chi ti\u1ebft t\u1ea1i \u0111\u00e2y. ph\u1ea1m vi kh\u1edbp n\u1ed1i ch\u00ednh x\u00e1c<\/a> D\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng ph\u00f2ng s\u1ea1ch.<\/p>","protected":false},"excerpt":{"rendered":"

    Semiconductor manufacturing is arguably the most demanding environment in which any mechanical component can be asked to operate. The positioning tolerances required are measured in nanometres. The cleanliness standards \u2014 typically ISO Class 1 to ISO Class 4 cleanrooms \u2014 permit only a handful of particles per cubic metre of air. The chemical environment includes […]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[722],"tags":[892,898,891,895,894,897,896,893,899],"class_list":["post-877","post","type-post","status-publish","format-standard","hentry","category-blog","tag-cleanroom-coupling","tag-iso-cleanroom-coupling","tag-oldham-coupling-semiconductor","tag-outgassing-coupling","tag-peek-coupling-cleanroom","tag-semiconductor-motion-coupling","tag-vacuum-compatible-coupling","tag-wafer-handling-coupling","tag-wafer-robot-coupling"],"_links":{"self":[{"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/posts\/877","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/comments?post=877"}],"version-history":[{"count":0,"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/posts\/877\/revisions"}],"wp:attachment":[{"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/media?parent=877"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/categories?post=877"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/oldhamcoupling.net\/vi\/wp-json\/wp\/v2\/tags?post=877"}],"curies":[{"name":"trang web","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}