![\"Oldham](\"https:\/\/oldhamcoupling.net\/wp-content\/uploads\/2026\/06\/oldham-coupling-4.webp\")
\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u6c5a\u67d3\u306e\u8ab2\u984c<\/h2>\n
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- \n
- \u7c92\u5b50\u751f\u6210\u7387\uff1a<\/strong> \u901a\u5e38\u306e\u904b\u8ee2\u6642\u306b\u304a\u3044\u3066\u3001\u5f53\u8a72\u90e8\u54c1\u306f\u5358\u4f4d\u6642\u9593\u3042\u305f\u308a\u306b\u898f\u5b9a\u30b5\u30a4\u30ba\u306e\u7c92\u5b50\u3092\u4f55\u500b\u653e\u51fa\u3059\u308b\u304b\uff1f\u3053\u308c\u306f\u5236\u5fa1\u3055\u308c\u305f\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3067\u6e2c\u5b9a\u3055\u308c\u3001\u5358\u4f4d\u9762\u7a4d\u307e\u305f\u306f\u5358\u4f4d\u4f53\u7a4d\u3042\u305f\u308a\u306e1\u5206\u3042\u305f\u308a\u306e\u7c92\u5b50\u6570\u3068\u3057\u3066\u8868\u3055\u308c\u308b\u3002<\/li>\n
- \u30ac\u30b9\u653e\u51fa\u7387\uff1a<\/strong> \u771f\u7a7a\u307e\u305f\u306f\u307b\u307c\u771f\u7a7a\u72b6\u614b\u306b\u304a\u3044\u3066\u3001\u52d5\u4f5c\u6e29\u5ea6\u3067\u306e\u90e8\u54c1\u304b\u3089\u306e\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269\uff08VOC\uff09\u306e\u653e\u51fa\u901f\u5ea6\u306f\u3069\u306e\u304f\u3089\u3044\u3067\u3059\u304b\uff1f\u5358\u4f4d\u9762\u7a4d\u3042\u305f\u308a\u306ePa\u30fbm\u00b3\/s\u3067\u6e2c\u5b9a\u3055\u308c\u308b\u3053\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u306f\u3001\u771f\u7a7a\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\u3067\u4f7f\u7528\u3059\u308b\u6750\u6599\u306e\u9069\u5408\u6027\u3092\u5de6\u53f3\u3057\u307e\u3059\u3002<\/li>\n
- \u5316\u5b66\u7684\u9069\u5408\u6027\uff1a<\/strong> \u305d\u306e\u6750\u6599\u306f\u3001\u52d5\u4f5c\u9818\u57df\u306b\u5b58\u5728\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u5316\u5b66\u7269\u8cea\uff08\u30d5\u30c3\u5316\u6c34\u7d20\u84b8\u6c17\u3001\u30aa\u30be\u30f3\u3001\u30a4\u30bd\u30d7\u30ed\u30d4\u30eb\u30a2\u30eb\u30b3\u30fc\u30eb\u3001\u6c34\u9178\u5316\u30a2\u30f3\u30e2\u30cb\u30a6\u30e0\u3001\u904e\u9178\u5316\u6c34\u7d20\u306a\u3069\u3001\u30d7\u30ed\u30bb\u30b9\u5de5\u7a0b\u306b\u5fdc\u3058\u3066\u7570\u306a\u308b\u3082\u306e\uff09\u306b\u5bfe\u3057\u3066\u8010\u6027\u304c\u3042\u308a\u307e\u3059\u304b\uff1f<\/li>\n
- \u30a4\u30aa\u30f3\u6c5a\u67d3\uff1a<\/strong> \u305d\u306e\u6750\u6599\u306f\u3001\u30a6\u30a7\u30cf\u8868\u9762\u306b\u4ed8\u7740\u3057\u3066\u30c7\u30d0\u30a4\u30b9\u306e\u96fb\u6c17\u7684\u7279\u6027\u3092\u5909\u5316\u3055\u305b\u308b\u53ef\u80fd\u6027\u306e\u3042\u308b\u91d1\u5c5e\u30a4\u30aa\u30f3\u3084\u305d\u306e\u4ed6\u306e\u30a4\u30aa\u30f3\u7a2e\u3092\u653e\u51fa\u3057\u307e\u3059\u304b\uff1f<\/li>\n<\/ul>\n
Why the Oldham Coupling’s Sliding Disc Is Both the Challenge and the Solution<\/h2>\n
The centre disc’s sliding motion is the source of the Oldham coupling’s misalignment accommodation capability \u2014 but it is also a potential source of particle generation. Every sliding contact produces wear debris, and in a cleanroom environment those debris particles must be managed.<\/p>\n
\u91cd\u8981\u306a\u306e\u306f\u6750\u6599\u306e\u9078\u629e\u3067\u3059\u3002\u6a19\u6e96\u7684\u306a\u30a2\u30bb\u30bf\u30fc\u30eb\u6a39\u8102\u306f\u3001\u904b\u8ee2\u4e2d\u306b\u6e2c\u5b9a\u53ef\u80fd\u306a\u7c92\u5b50\u3092\u767a\u751f\u3055\u305b\u307e\u3059\u304c\u3001\u3053\u308c\u306f\u5de5\u696d\u74b0\u5883\u3067\u306f\u8a31\u5bb9\u7bc4\u56f2\u5185\u3067\u3042\u308b\u3082\u306e\u306e\u3001ISO\u30af\u30e9\u30b93\u4ee5\u4e0a\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3067\u306e\u4f7f\u7528\u306b\u306f\u7c92\u5b50\u6570\u3068\u7c92\u5ea6\u5206\u5e03\u304c\u9ad8\u3059\u304e\u307e\u3059\u3002\u4e00\u65b9\u3001PEEK\u3001\u7279\u306bPTFE\u3084\u70ad\u7d20\u7e4a\u7dad\u3092\u5145\u586b\u3057\u305fPEEK\u306f\u3001\u540c\u3058\u647a\u52d5\u6761\u4ef6\u4e0b\u3067\u767a\u751f\u3059\u308b\u7c92\u5b50\u6570\u304c\u5927\u5e45\u306b\u5c11\u306a\u304f\u3001\u7c92\u5b50\u30b5\u30a4\u30ba\u3082\u5c0f\u3055\u304f\u3001\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306e\u5206\u985e\u57fa\u6e96\u306b\u5bfe\u3057\u3066\u3088\u308a\u597d\u307e\u3057\u3044\u7c92\u5ea6\u5206\u5e03\u3092\u793a\u3057\u307e\u3059\u3002<\/p>\n
\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3084ISO\u30af\u30e9\u30b91\uff5e2\u306e\u74b0\u5883\u306a\u3069\u3001\u6700\u3082\u8981\u6c42\u306e\u53b3\u3057\u3044\u534a\u5c0e\u4f53\u7528\u9014\u306b\u306f\u3001\u7d14\u5ea6\u7ba1\u7406\u3055\u308c\u305f\u8d85\u9ad8\u7d14\u5ea6PEEK\u30b0\u30ec\u30fc\u30c9\uff08\u91d1\u5c5e\u30a4\u30aa\u30f3\u542b\u6709\u91cf\u304c\u4f4e\u304f\u3001\u30ac\u30b9\u653e\u51fa\u306e\u539f\u56e0\u3068\u306a\u308b\u53ef\u5851\u5264\u3084\u5145\u586b\u5264\u3092\u542b\u307e\u306a\u3044\uff09\u304c\u6307\u5b9a\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u6750\u6599\u306f\u3001\u30ac\u30b9\u653e\u51fa\u7387\u3068\u7c92\u5b50\u767a\u751f\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u306e\u30ed\u30c3\u30c8\u9593\u4e00\u8cab\u6027\u304c\u6587\u66f8\u5316\u3055\u308c\u305f\u7ba1\u7406\u3055\u308c\u305f\u6761\u4ef6\u4e0b\u3067\u88fd\u9020\u3055\u308c\u307e\u3059\u3002\u30b3\u30b9\u30c8\u306f\u6a19\u6e96PEEK\u3088\u308a\u3082\u5927\u5e45\u306b\u9ad8\u304f\u306a\u308a\u307e\u3059\u304c\u3001\u4ed8\u5c5e\u3059\u308b\u8a8d\u5b9a\u30c7\u30fc\u30bf\u30d1\u30c3\u30b1\u30fc\u30b8\u306f\u3001\u30c1\u30c3\u30d7\u30e1\u30fc\u30ab\u30fc\u304b\u3089\u30d7\u30ed\u30bb\u30b9\u30c4\u30fc\u30eb\u306e\u627f\u8a8d\u3092\u5f97\u3088\u3046\u3068\u3059\u308b\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u306b\u3068\u3063\u3066\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n
\u30a6\u30a7\u30cf\u642c\u9001\u30ed\u30dc\u30c3\u30c8\u7528\u30b8\u30e7\u30a4\u30f3\u30c8<\/h2>\n
\u5927\u6c17\u5727\u4e0b\u3067\u52d5\u4f5c\u3059\u308b\u30a6\u30a7\u30cf\u642c\u9001\u30ed\u30dc\u30c3\u30c8\uff08\u30ab\u30bb\u30c3\u30c8\u3001\u30ed\u30fc\u30c9\u30ed\u30c3\u30af\u3001\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\u9593\u3067\u30a6\u30a7\u30cf\u3092\u642c\u9001\u3059\u308bSCARA\u30ed\u30dc\u30c3\u30c8\u3084\u76f4\u4ea4\u5ea7\u6a19\u30ed\u30dc\u30c3\u30c8\uff09\u306f\u3001\u8907\u6570\u306e\u56de\u8ee2\u95a2\u7bc0\u3092\u5099\u3048\u3066\u304a\u308a\u3001\u5404\u95a2\u7bc0\u306f\u30b5\u30fc\u30dc\u30e2\u30fc\u30bf\u30fc\u306b\u3088\u3063\u3066\u30cf\u30fc\u30e2\u30cb\u30c3\u30af\u30c9\u30e9\u30a4\u30d6\u307e\u305f\u306f\u6e1b\u901f\u6a5f\u3092\u4ecb\u3057\u3066\u99c6\u52d5\u3055\u308c\u308b\u3002\u30e2\u30fc\u30bf\u30fc\u51fa\u529b\u8ef8\u3068\u30cf\u30fc\u30e2\u30cb\u30c3\u30af\u30c9\u30e9\u30a4\u30d6\u5165\u529b\u8ef8\u3068\u306e\u7d50\u5408\u306b\u306f\u3001\u6700\u65b0\u306e\u8a2d\u8a08\u306e\u307b\u3068\u3093\u3069\u3067\u30aa\u30fc\u30eb\u30c9\u30cf\u30e0\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u304c\u7528\u3044\u3089\u308c\u3066\u3044\u308b\u3002<\/p>\n
The requirements here are exacting. The robot must position a 300 mm wafer to within \u00b10.1 mm at the process chamber entrance slot, repeated millions of times over the tool’s service life. Any coupling backlash at the joint produces an end-effector positioning error amplified by the robot’s kinematic chain. Zero backlash at every joint is a non-negotiable requirement.<\/p>\n
The lateral offset tolerance of the Oldham coupling absorbs the small but unavoidable shaft misalignments between the motor and harmonic drive in the compact, stacked joint assembly \u2014 misalignments that cannot be corrected by shimming in the confined space of a robot joint housing. The alternative \u2014 a bellows coupling \u2014 would impose radial loads on the harmonic drive’s input bearing, reducing its service life in a component that is expensive and time-consuming to replace in a robot that may be installed in a process tool under a multi-year service contract.<\/p>\n
\n![\"Oldham](\"https:\/\/oldhamcoupling.net\/wp-content\/uploads\/2026\/06\/oldham-coupling-1.webp\")
\u30a6\u30a7\u30cf\u642c\u9001\u30ed\u30dc\u30c3\u30c8\u306e\u95a2\u7bc0\u90e8\u306b\u304a\u3044\u3066\u306f\u3001\u30d0\u30c3\u30af\u30e9\u30c3\u30b7\u30e5\u30bc\u30ed\u3068\u30e9\u30b8\u30a2\u30eb\u30d9\u30a2\u30ea\u30f3\u30b0\u8377\u91cd\u30bc\u30ed\u304c\u7b49\u3057\u304f\u91cd\u8981\u3067\u3042\u308b\u3002\u30aa\u30fc\u30eb\u30c9\u30cf\u30e0\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u306f\u3001\u7a4d\u5c64\u578b\u30ed\u30dc\u30c3\u30c8\u95a2\u7bc0\u30a2\u30bb\u30f3\u30d6\u30ea\u306e\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u7b50\u4f53\u5185\u3067\u3001\u3053\u306e\u4e21\u65b9\u3092\u5b9f\u73fe\u3059\u308b\u3002<\/figcaption><\/figure>\n \u30ea\u30cb\u30a2\u7cbe\u5bc6\u30b9\u30c6\u30fc\u30b8<\/h2>\n
\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u7528\u30b9\u30c6\u30c3\u30d1\u30fc\u3084\u30b9\u30ad\u30e3\u30ca\u3001\u30a6\u30a7\u30fc\u30cf\u691c\u67fb\u30b7\u30b9\u30c6\u30e0\u3001\u8a08\u6e2c\u30c4\u30fc\u30eb\u306a\u3069\u306f\u3001\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u4f4d\u7f6e\u6c7a\u3081\u5206\u89e3\u80fd\u3092\u6301\u3064\u8d85\u9ad8\u7cbe\u5ea6\u30ea\u30cb\u30a2\u30b9\u30c6\u30fc\u30b8\u3092\u4f7f\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u30b9\u30c6\u30fc\u30b8\u306f\u30ea\u30cb\u30a2\u30e2\u30fc\u30bf\u307e\u305f\u306f\u30dc\u30fc\u30eb\u306d\u3058\u306b\u3088\u3063\u3066\u99c6\u52d5\u3055\u308c\u3001\u30b5\u30fc\u30dc\u5236\u5fa1\u30eb\u30fc\u30d7\u306f\u30ec\u30fc\u30b6\u30fc\u5e72\u6e09\u8a08\u307e\u305f\u306f\u5149\u5b66\u30a8\u30f3\u30b3\u30fc\u30c0\u306e\u8aad\u307f\u53d6\u308a\u5024\u306b\u57fa\u3065\u3044\u3066\u9589\u3058\u3089\u308c\u307e\u3059\u3002\u99c6\u52d5\u7cfb\u306b\u304a\u3051\u308b\u6a5f\u68b0\u7684\u306a\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u3084\u30d0\u30c3\u30af\u30e9\u30c3\u30b7\u30e5\u306f\u3001\u30d5\u30a3\u30fc\u30c9\u30d0\u30c3\u30af\u30eb\u30fc\u30d7\u306b\u304a\u3044\u3066\u4f4d\u7f6e\u8aa4\u5dee\u3068\u3057\u3066\u76f4\u63a5\u73fe\u308c\u307e\u3059\u3002<\/p>\n
In ballscrew-driven precision stages, the Oldham coupling between the servo motor and the ballscrew serves the same function as in any CNC machine \u2014 zero-backlash torque transmission with lateral offset accommodation \u2014 but to higher performance standards. The coupling must maintain zero backlash for the full qualified service life of the stage, typically 5 to 10 years of daily use, with disc replacement performed as part of the stage’s planned maintenance schedule. Precision-grade Oldham couplings for these applications are manufactured to tighter tenon width tolerances than standard industrial couplings, minimising the initial backlash from assembly tolerance stack-up.<\/p>\n
\u771f\u7a7a\u5bfe\u5fdc\uff1a\u91cd\u8981\u306a\u8ffd\u52a0\u8981\u4ef6<\/h2>\n
\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u591a\u304f\u306e\u5de5\u7a0b\u306f\u771f\u7a7a\u4e2d\u3067\u884c\u308f\u308c\u308b\u3002\u7269\u7406\u84b8\u7740\u3001\u5316\u5b66\u84b8\u7740\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u3044\u3063\u305f\u30d7\u30ed\u30bb\u30b9\u306f\u3059\u3079\u3066\u3001\u5927\u6c17\u5727\u304b\u308910\u207b\u2079 Torr\u307e\u3067\u306e\u5727\u529b\u7bc4\u56f2\u3067\u5b9f\u65bd\u3055\u308c\u308b\u3002\u771f\u7a7a\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u307e\u305f\u306f\u305d\u306e\u8fd1\u508d\u306b\u3042\u308b\u6a5f\u68b0\u90e8\u54c1\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u771f\u7a7a\u3092\u640d\u306a\u3046\u3088\u3046\u306a\u901f\u5ea6\u3067\u30ac\u30b9\u3092\u653e\u51fa\u3057\u3066\u306f\u306a\u3089\u306a\u3044\u3002<\/p>\n
\u6a19\u6e96\u7684\u306a\u30dd\u30ea\u30de\u30fc\u6750\u6599\uff08\u6a19\u6e96\u30b0\u30ec\u30fc\u30c9\u306e\u30a2\u30bb\u30bf\u30fc\u30eb\u3001\u30ca\u30a4\u30ed\u30f3\u3001\u3055\u3089\u306b\u306f\u6a19\u6e96PEEK\u306a\u3069\uff09\u306b\u306f\u3001\u6b8b\u7559\u30e2\u30ce\u30de\u30fc\u3001\u53ef\u5851\u5264\u3001\u52a0\u5de5\u52a9\u5264\u304c\u542b\u307e\u308c\u3066\u304a\u308a\u3001\u3053\u308c\u3089\u306f\u771f\u7a7a\u4e0b\u3067\u9ad8\u771f\u7a7a\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u306f\u8a31\u5bb9\u3067\u304d\u306a\u3044\u901f\u5ea6\u3067\u30ac\u30b9\u3092\u653e\u51fa\u3057\u307e\u3059\u3002\u771f\u7a7a\u5bfe\u5fdcPEEK\u30b0\u30ec\u30fc\u30c9\u306f\u3001\u30ac\u30b9\u653e\u51fa\u901f\u5ea6\u3092\u5236\u5fa1\u3057\u3066\u88fd\u9020\u3055\u308c\u3066\u304a\u308a\u3001\u901a\u5e38\u306fNASA\u306e\u30ac\u30b9\u653e\u51fa\u57fa\u6e96\uff08ASTM E595\uff09\u3092\u6e80\u305f\u3057\u3066\u3044\u307e\u3059\u3002\u3059\u306a\u308f\u3061\u3001\u771f\u7a7a\u4e0b125\u2103\u306724\u6642\u9593\u7d4c\u904e\u5f8c\u3001\u7dcf\u8cea\u91cf\u640d\u5931\u304c1.0%\u672a\u6e80\u3001\u63ee\u767a\u6027\u51dd\u7e2e\u7269\u8cea\u306e\u56de\u53ce\u7387\u304c0.1%\u672a\u6e80\u3067\u3059\u3002<\/p>\n
\u771f\u7a7a\u74b0\u5883\u3067\u4f7f\u7528\u3059\u308b\u30aa\u30fc\u30eb\u30c9\u30cf\u30e0\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u306b\u3064\u3044\u3066\u306f\u3001\u30e1\u30fc\u30ab\u30fc\u304b\u3089\u30ac\u30b9\u653e\u51fa\u30c7\u30fc\u30bf\u304c\u6587\u66f8\u5316\u3055\u308c\u3066\u3044\u308b\u30c7\u30a3\u30b9\u30af\u6750\u6599\u3092\u6307\u5b9a\u3057\u3066\u304f\u3060\u3055\u3044\u3002\u6a19\u6e96\u30ab\u30bf\u30ed\u30b0\u306e\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u306f\u771f\u7a7a\u5b9a\u683c\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u771f\u7a7a\u5bfe\u5fdc\u30d0\u30fc\u30b8\u30e7\u30f3\u306f\u3001\u7279\u5b9a\u306e\u6750\u6599\u8a8d\u8a3c\u304c\u5fc5\u8981\u3067\u3042\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\u74b0\u5883\u3078\u306e\u8a2d\u7f6e\u524d\u306b\u30d9\u30fc\u30ad\u30f3\u30b0\u51e6\u7406\u304c\u5fc5\u8981\u3068\u306a\u308b\u5834\u5408\u304c\u307b\u3068\u3093\u3069\u3067\u3059\u3002\u771f\u7a7a\u7528\u9014\u306e\u30cf\u30d6\u6750\u6599\u306f\u3001\u4e00\u822c\u7684\u306b\u96fb\u89e3\u7814\u78e8\u3055\u308c\u305f\u8868\u9762\u3092\u6301\u3064304\u307e\u305f\u306f316L\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u3067\u3059\u3002\u7814\u78e8\u3055\u308c\u305f\u8868\u9762\u306f\u8868\u9762\u7a4d\u5bfe\u4f53\u7a4d\u6bd4\u304c\u4f4e\u3044\u305f\u3081\u3001\u771f\u7a7a\u4e2d\u3067\u8131\u7740\u3059\u308b\u5438\u7740\u30ac\u30b9\u5c64\u304c\u6700\u5c0f\u9650\u306b\u6291\u3048\u3089\u308c\u307e\u3059\u3002<\/p>\n
\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306b\u304a\u3051\u308b\u96fb\u6c17\u7684\u8003\u616e\u4e8b\u9805<\/h2>\n
\u534a\u5c0e\u4f53\u30a6\u30a7\u30fc\u30cf\u306f\u9759\u96fb\u6c17\u306b\u654f\u611f\u3067\u3042\u308a\u3001\u53d6\u308a\u6271\u3044\u4e2d\u306b\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306b\u96fb\u8377\u304c\u84c4\u7a4d\u3059\u308b\u3068\u3001\u9759\u96fb\u6c17\u653e\u96fb\uff08ESD\uff09\u306b\u3088\u3063\u3066\u30b2\u30fc\u30c8\u9178\u5316\u819c\u304c\u640d\u50b7\u3057\u3001\u76ee\u306b\u898b\u3048\u308b\u75d5\u8de1\u306f\u6b8b\u3089\u306a\u3044\u3082\u306e\u306e\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6a5f\u80fd\u304c\u640d\u306a\u308f\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u88c5\u7f6e\u306e\u63a5\u5730\u3068\u9759\u96fb\u6c17\u5bfe\u7b56\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306e\u8a2d\u8a08\u306b\u304a\u3044\u3066\u72ec\u7acb\u3057\u305f\u5c02\u9580\u5206\u91ce\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n
The Oldham coupling’s electrical isolation property \u2014 provided by the non-conducting polymer disc \u2014 prevents shaft currents generated by servo drive switching from propagating through the drive chain into the robot structure and potentially to the wafer. In some tool designs, this isolation is deliberately engineered into the drive train using an Oldham coupling specifically to break the electrical continuity between the servo amplifier and the robot’s conductive end-effector and wafer handling surfaces.<\/p>\n
Conversely, in tools where the robot structure must be grounded throughout for ESD management, a metallic coupling is specified to maintain electrical continuity. The coupling specification must match the equipment’s grounding architecture, which requires understanding the tool’s ESD management strategy before selecting between polymer-disc and metal-disc Oldham couplings.<\/p>\n
\u534a\u5c0e\u4f53\u30aa\u30fc\u30eb\u30c9\u30cf\u30e0\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u306e\u4ed5\u69d8\u30c1\u30a7\u30c3\u30af\u30ea\u30b9\u30c8<\/h2>\n
\n\n\n\n
\n \n\u8981\u4ef6<\/th>\n \u4ed5\u69d8<\/th>\n \u6839\u62e0<\/th>\n<\/tr>\n<\/thead>\n \n \u30c7\u30a3\u30b9\u30af\u7d20\u6750<\/td>\n \u8d85\u9ad8\u7d14\u5ea6PEEK\u307e\u305f\u306fPTFE\u8907\u5408\u6750<\/td>\n \u4f4e\u7c92\u5b50\u767a\u751f\u3001\u4f4e\u30a2\u30a6\u30c8\u30ac\u30b9\u3001\u8010\u85ac\u54c1\u6027<\/td>\n<\/tr>\n \n \u30cf\u30d6\u7d20\u6750<\/td>\n 316L\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u3001\u96fb\u89e3\u7814\u78e8\u4ed5\u4e0a\u3052<\/td>\n \u8010\u8150\u98df\u6027\u3001\u4f4e\u5438\u7740\u30ac\u30b9\u5c64\u3001\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u5bfe\u5fdc\u8868\u9762<\/td>\n<\/tr>\n \n \u30ac\u30b9\u653e\u51fa\u8a8d\u8a3c<\/td>\n ASTM E595\uff08TML <1.0%\u3001CVCM <0.1%\uff09<\/td>\n \u771f\u7a7a\u30d7\u30ed\u30bb\u30b9\u74b0\u5883\u3067\u5fc5\u8981<\/td>\n<\/tr>\n \n \u30cf\u30d6\u30b9\u30bf\u30a4\u30eb<\/td>\n \u30af\u30e9\u30f3\u30d7\uff08\u5206\u5272\u7a74\uff09<\/td>\n \u30b7\u30e3\u30d5\u30c8\u8868\u9762\u306e\u640d\u50b7\u306a\u3057\u3001\u518d\u73fe\u6027\u306e\u9ad8\u3044\u540c\u5fc3\u5ea6\u3001\u30bb\u30c3\u30c8\u30b9\u30af\u30ea\u30e5\u30fc\u306e\u7c92\u5b50\u30ea\u30b9\u30af\u306a\u3057<\/td>\n<\/tr>\n \n \u6f64\u6ed1<\/td>\n \u306a\u3057\uff08\u30c9\u30e9\u30a4\u30e9\u30f3\u30cb\u30f3\u30b0\uff09<\/td>\n \u6f64\u6ed1\u6cb9\u84b8\u6c17\u306f\u3001\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3084\u771f\u7a7a\u74b0\u5883\u306b\u304a\u3051\u308b\u6c5a\u67d3\u6e90\u3068\u306a\u308b\u3002<\/td>\n<\/tr>\n \n \u53cd\u767a<\/td>\n \u30bc\u30ed\uff08\u516c\u79f00\u5206\u89d2\uff09<\/td>\n \u30a6\u30a7\u30cf\u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6\u8981\u4ef6<\/td>\n<\/tr>\n \n \u6d17\u6d44\u9069\u5408\u6027<\/td>\n IPA\u3001\u7d14\u6c34\u62ed\u304d<\/td>\n \u6a19\u6e96\u7684\u306a\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u6d17\u6d44\u624b\u9806<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n \u7d50\u8ad6<\/h2>\n
\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306f\u3001\u30aa\u30fc\u30eb\u30c9\u30cf\u30e0\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u304c\u305d\u306e\u9069\u7528\u7bc4\u56f2\u306b\u304a\u3044\u3066\u906d\u9047\u3059\u308b\u6700\u3082\u6280\u8853\u7684\u306b\u53b3\u3057\u3044\u52d5\u4f5c\u74b0\u5883\u3067\u3059\u3002\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u4f4d\u7f6e\u6c7a\u3081\u8981\u4ef6\u3001\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u7c92\u5b50\u306e\u767a\u751f\u5236\u9650\u3001\u771f\u7a7a\u8131\u30ac\u30b9\u57fa\u6e96\u3001ESD\u7ba1\u7406\u8981\u4ef6\u3001\u305d\u3057\u3066\u53b3\u3057\u3044\u5316\u5b66\u7684\u9069\u5408\u6027\u8981\u6c42\u3068\u3044\u3063\u305f\u8981\u7d20\u304c\u7d44\u307f\u5408\u308f\u3055\u308b\u3053\u3068\u3067\u3001\u307b\u3068\u3093\u3069\u306e\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u306f\u691c\u8a0e\u5bfe\u8c61\u304b\u3089\u5b8c\u5168\u306b\u9664\u5916\u3055\u308c\u307e\u3059\u3002\u30aa\u30fc\u30eb\u30c9\u30cf\u30e0\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u306f\u3001\u9069\u5207\u306a\u8d85\u30af\u30ea\u30fc\u30f3PEEK\u30c7\u30a3\u30b9\u30af\u3001\u96fb\u89e3\u7814\u78e8\u3055\u308c\u305f\u30b9\u30c6\u30f3\u30ec\u30b9\u30cf\u30d6\u3001\u305d\u3057\u3066\u6587\u66f8\u5316\u3055\u308c\u305f\u8131\u30ac\u30b9\u8a8d\u8a3c\u306b\u3088\u3063\u3066\u4ed5\u69d8\u304c\u5b9a\u3081\u3089\u308c\u308c\u3070\u3001\u3053\u306e\u8a8d\u5b9a\u30d7\u30ed\u30bb\u30b9\u3092\u30af\u30ea\u30a2\u3057\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u305d\u306e\u52d5\u4f5c\u539f\u7406\u304c\u30d9\u30a2\u30ea\u30f3\u30b0\u8ca0\u8377\u30bc\u30ed\u3001\u30d0\u30c3\u30af\u30e9\u30c3\u30b7\u30e5\u30bc\u30ed\u3001\u305d\u3057\u3066\u30c9\u30e9\u30a4\u30e9\u30f3\u30cb\u30f3\u30b0\u3092\u5b9f\u73fe\u3057\u3001\u3053\u308c\u3089\u3059\u3079\u3066\u304c\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u74b0\u5883\u306e\u8981\u6c42\u306b\u6b63\u78ba\u306b\u5408\u81f4\u3059\u308b\u304b\u3089\u3067\u3059\u3002\u8a2d\u8a08\u6bb5\u968e\u3067\u9069\u5207\u306a\u4ed5\u69d8\u306b\u6295\u8cc7\u3059\u308b\u3053\u3068\u3067\u3001\u30a6\u30a7\u30fc\u30cf\u640d\u5931\u306e\u524a\u6e1b\u3001\u88c5\u7f6e\u306e\u7a3c\u50cd\u6642\u9593\u306e\u5ef6\u9577\u3001\u305d\u3057\u3066\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u624b\u9806\u306e\u7c21\u7d20\u5316\u3068\u3044\u3063\u305f\u5f62\u3067\u3001\u4f55\u500d\u3082\u306e\u898b\u8fd4\u308a\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n
\u304a\u554f\u3044\u5408\u308f\u305b\u5148 \u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30c1\u30fc\u30e0<\/a> \u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u30aa\u30fc\u30eb\u30c9\u30cf\u30e0\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u306e\u4ed5\u69d8\uff08\u30a2\u30a6\u30c8\u30ac\u30b9\u306b\u95a2\u3059\u308b\u8cc7\u6599\u3092\u542b\u3080\uff09\u306b\u3064\u3044\u3066\u306f\u3001\u307e\u305f\u306f\u5f53\u793e\u306e\u30a6\u30a7\u30d6\u30b5\u30a4\u30c8\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\u3002 \u7cbe\u5bc6\u7d50\u5408\u7bc4\u56f2<\/a> \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u7528\u9014\u5411\u3051\u3002<\/p>","protected":false},"excerpt":{"rendered":"
Semiconductor manufacturing is arguably the most demanding environment in which any mechanical component can be asked to operate. The positioning tolerances required are measured in nanometres. The cleanliness standards \u2014 typically ISO Class 1 to ISO Class 4 cleanrooms \u2014 permit only a handful of particles per cubic metre of air. The chemical environment includes corrosive process gases, ultra-pure water, and aggressive solvents. And the consequence of contamination or positioning error is not a cosmetic defect but the destruction of a silicon wafer worth thousands of dollars, or the compromise of an entire fabrication lot. In this environment, every mechanical component in a motion system is scrutinised for particle generation, […]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[722],"tags":[892,898,891,895,894,897,896,893,899],"class_list":["post-877","post","type-post","status-publish","format-standard","hentry","category-blog","tag-cleanroom-coupling","tag-iso-cleanroom-coupling","tag-oldham-coupling-semiconductor","tag-outgassing-coupling","tag-peek-coupling-cleanroom","tag-semiconductor-motion-coupling","tag-vacuum-compatible-coupling","tag-wafer-handling-coupling","tag-wafer-robot-coupling"],"_links":{"self":[{"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/posts\/877","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/comments?post=877"}],"version-history":[{"count":0,"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/posts\/877\/revisions"}],"wp:attachment":[{"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/media?parent=877"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/categories?post=877"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/oldhamcoupling.net\/ja\/wp-json\/wp\/v2\/tags?post=877"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
- \u30ac\u30b9\u653e\u51fa\u7387\uff1a<\/strong> \u771f\u7a7a\u307e\u305f\u306f\u307b\u307c\u771f\u7a7a\u72b6\u614b\u306b\u304a\u3044\u3066\u3001\u52d5\u4f5c\u6e29\u5ea6\u3067\u306e\u90e8\u54c1\u304b\u3089\u306e\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269\uff08VOC\uff09\u306e\u653e\u51fa\u901f\u5ea6\u306f\u3069\u306e\u304f\u3089\u3044\u3067\u3059\u304b\uff1f\u5358\u4f4d\u9762\u7a4d\u3042\u305f\u308a\u306ePa\u30fbm\u00b3\/s\u3067\u6e2c\u5b9a\u3055\u308c\u308b\u3053\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u306f\u3001\u771f\u7a7a\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\u3067\u4f7f\u7528\u3059\u308b\u6750\u6599\u306e\u9069\u5408\u6027\u3092\u5de6\u53f3\u3057\u307e\u3059\u3002<\/li>\n